JPS6328338B2 - - Google Patents
Info
- Publication number
- JPS6328338B2 JPS6328338B2 JP55040893A JP4089380A JPS6328338B2 JP S6328338 B2 JPS6328338 B2 JP S6328338B2 JP 55040893 A JP55040893 A JP 55040893A JP 4089380 A JP4089380 A JP 4089380A JP S6328338 B2 JPS6328338 B2 JP S6328338B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- resist
- forming
- resist pattern
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4089380A JPS56137623A (en) | 1980-03-28 | 1980-03-28 | Forming of cross pattern electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4089380A JPS56137623A (en) | 1980-03-28 | 1980-03-28 | Forming of cross pattern electrode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56137623A JPS56137623A (en) | 1981-10-27 |
| JPS6328338B2 true JPS6328338B2 (enrdf_load_stackoverflow) | 1988-06-08 |
Family
ID=12593183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4089380A Granted JPS56137623A (en) | 1980-03-28 | 1980-03-28 | Forming of cross pattern electrode |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56137623A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58175830A (ja) * | 1982-04-08 | 1983-10-15 | Matsushita Electric Ind Co Ltd | パタ−ン形成方法 |
-
1980
- 1980-03-28 JP JP4089380A patent/JPS56137623A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56137623A (en) | 1981-10-27 |
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