JPH0222537B2 - - Google Patents
Info
- Publication number
- JPH0222537B2 JPH0222537B2 JP55040894A JP4089480A JPH0222537B2 JP H0222537 B2 JPH0222537 B2 JP H0222537B2 JP 55040894 A JP55040894 A JP 55040894A JP 4089480 A JP4089480 A JP 4089480A JP H0222537 B2 JPH0222537 B2 JP H0222537B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- resist
- resist pattern
- forming
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 10
- 239000004020 conductor Substances 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 2
- 230000001131 transforming effect Effects 0.000 claims description 2
- 230000000873 masking effect Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 description 5
- 230000002950 deficient Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 231100000989 no adverse effect Toxicity 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4089480A JPS56137624A (en) | 1980-03-28 | 1980-03-28 | Forming of cross pattern electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4089480A JPS56137624A (en) | 1980-03-28 | 1980-03-28 | Forming of cross pattern electrode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56137624A JPS56137624A (en) | 1981-10-27 |
| JPH0222537B2 true JPH0222537B2 (enrdf_load_stackoverflow) | 1990-05-18 |
Family
ID=12593209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4089480A Granted JPS56137624A (en) | 1980-03-28 | 1980-03-28 | Forming of cross pattern electrode |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56137624A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB8729952D0 (en) * | 1987-12-23 | 1988-02-03 | British Telecomm | Mounting assembly for optical equipment |
-
1980
- 1980-03-28 JP JP4089480A patent/JPS56137624A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56137624A (en) | 1981-10-27 |