JPS63283180A - 変位センサを有する圧電アクチュエ−タ - Google Patents

変位センサを有する圧電アクチュエ−タ

Info

Publication number
JPS63283180A
JPS63283180A JP62118553A JP11855387A JPS63283180A JP S63283180 A JPS63283180 A JP S63283180A JP 62118553 A JP62118553 A JP 62118553A JP 11855387 A JP11855387 A JP 11855387A JP S63283180 A JPS63283180 A JP S63283180A
Authority
JP
Japan
Prior art keywords
displacement
voltage
piezoelectric
vessel
amplifier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62118553A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0519994B2 (enrdf_load_stackoverflow
Inventor
Takashi Kawai
高志 河合
Yasushi Miyata
裕史 宮田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP62118553A priority Critical patent/JPS63283180A/ja
Publication of JPS63283180A publication Critical patent/JPS63283180A/ja
Publication of JPH0519994B2 publication Critical patent/JPH0519994B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Measuring Fluid Pressure (AREA)
JP62118553A 1987-05-15 1987-05-15 変位センサを有する圧電アクチュエ−タ Granted JPS63283180A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62118553A JPS63283180A (ja) 1987-05-15 1987-05-15 変位センサを有する圧電アクチュエ−タ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62118553A JPS63283180A (ja) 1987-05-15 1987-05-15 変位センサを有する圧電アクチュエ−タ

Publications (2)

Publication Number Publication Date
JPS63283180A true JPS63283180A (ja) 1988-11-21
JPH0519994B2 JPH0519994B2 (enrdf_load_stackoverflow) 1993-03-18

Family

ID=14739434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62118553A Granted JPS63283180A (ja) 1987-05-15 1987-05-15 変位センサを有する圧電アクチュエ−タ

Country Status (1)

Country Link
JP (1) JPS63283180A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06188471A (ja) * 1992-12-22 1994-07-08 Nec Corp 電圧アクチュエータ
US6046525A (en) * 1996-03-28 2000-04-04 Nec Corporation Piezo-electric actuator control method and device and variable wavelength filter using the piezo-electric actuator device
JP2020035973A (ja) * 2018-08-31 2020-03-05 日本特殊陶業株式会社 圧電アクチュエータ
JP2020035972A (ja) * 2018-08-31 2020-03-05 日本特殊陶業株式会社 圧電アクチュエータ
JPWO2021117626A1 (enrdf_load_stackoverflow) * 2019-12-11 2021-06-17
CN114060257A (zh) * 2020-07-30 2022-02-18 费斯托股份两合公司 流体设备

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57172202A (en) * 1981-04-17 1982-10-23 Hitachi Ltd Displacement generator
JPS6265390A (ja) * 1985-09-17 1987-03-24 Toshiba Corp 積層型圧電変位素子
JPS6364580A (ja) * 1986-09-02 1988-03-23 Hitachi Constr Mach Co Ltd 圧電アクチユエ−タ
JPS6366980A (ja) * 1986-09-09 1988-03-25 Nippon Denso Co Ltd 積層型圧電体
JPS63140661U (enrdf_load_stackoverflow) * 1987-03-06 1988-09-16

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57172202A (en) * 1981-04-17 1982-10-23 Hitachi Ltd Displacement generator
JPS6265390A (ja) * 1985-09-17 1987-03-24 Toshiba Corp 積層型圧電変位素子
JPS6364580A (ja) * 1986-09-02 1988-03-23 Hitachi Constr Mach Co Ltd 圧電アクチユエ−タ
JPS6366980A (ja) * 1986-09-09 1988-03-25 Nippon Denso Co Ltd 積層型圧電体
JPS63140661U (enrdf_load_stackoverflow) * 1987-03-06 1988-09-16

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06188471A (ja) * 1992-12-22 1994-07-08 Nec Corp 電圧アクチュエータ
US6046525A (en) * 1996-03-28 2000-04-04 Nec Corporation Piezo-electric actuator control method and device and variable wavelength filter using the piezo-electric actuator device
JP2020035973A (ja) * 2018-08-31 2020-03-05 日本特殊陶業株式会社 圧電アクチュエータ
JP2020035972A (ja) * 2018-08-31 2020-03-05 日本特殊陶業株式会社 圧電アクチュエータ
JPWO2021117626A1 (enrdf_load_stackoverflow) * 2019-12-11 2021-06-17
WO2021117626A1 (ja) * 2019-12-11 2021-06-17 京セラ株式会社 圧電アクチュエータ
CN114762138A (zh) * 2019-12-11 2022-07-15 京瓷株式会社 压电致动器
CN114060257A (zh) * 2020-07-30 2022-02-18 费斯托股份两合公司 流体设备

Also Published As

Publication number Publication date
JPH0519994B2 (enrdf_load_stackoverflow) 1993-03-18

Similar Documents

Publication Publication Date Title
JP2586371B2 (ja) 圧電アクチュエータ
US4491760A (en) Force sensing polymer piezoelectric transducer array
JP2540344B2 (ja) 心臓ペ―スメ―カ用活動力センサ
JPS62191730A (ja) 圧力センサ
JPH0414305B2 (enrdf_load_stackoverflow)
US4461179A (en) Device sensitive to pressure waves
WO2019014866A1 (zh) 一种压力感应装置及压力感应设备
JPS63283180A (ja) 変位センサを有する圧電アクチュエ−タ
GB2149570A (en) Piezoelectric transducer
JPS62156503A (ja) 圧電センサ
WO2022155910A1 (zh) 电池形变检测装置及电池管理系统
JP2004226294A (ja) 静圧動圧検知センサ
JPS62238417A (ja) 多機能マトリツクスセンサ
JPH04132921A (ja) 圧力検出器
JPH10209516A (ja) 圧電素子の状態検出方法および圧電素子装置
JP2004132882A (ja) 静圧動圧検知センサ
JPH08159706A (ja) 間隔センサ
JP3148945B2 (ja) 加速度センサ
JPH0666827A (ja) 加速度センサ
GB2197121A (en) Force transducer with temperature correction
JPH07260819A (ja) 加速度センサ
JPH07106657A (ja) 圧電アクチュエータ及びその製造方法
JPS63266338A (ja) 圧電振動子
JPH0367160A (ja) 酸素センサの製造方法
JPH0246907B2 (enrdf_load_stackoverflow)