JPS6327768B2 - - Google Patents
Info
- Publication number
- JPS6327768B2 JPS6327768B2 JP10916679A JP10916679A JPS6327768B2 JP S6327768 B2 JPS6327768 B2 JP S6327768B2 JP 10916679 A JP10916679 A JP 10916679A JP 10916679 A JP10916679 A JP 10916679A JP S6327768 B2 JPS6327768 B2 JP S6327768B2
- Authority
- JP
- Japan
- Prior art keywords
- ferrite
- sputter
- mask
- head
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910000859 α-Fe Inorganic materials 0.000 claims description 28
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 19
- 239000007789 gas Substances 0.000 claims description 18
- 229910052786 argon Inorganic materials 0.000 claims description 12
- 238000000992 sputter etching Methods 0.000 claims description 12
- 229910018605 Ni—Zn Inorganic materials 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 description 11
- 238000003754 machining Methods 0.000 description 5
- 230000007547 defect Effects 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Magnetic Heads (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10916679A JPS5634123A (en) | 1979-08-29 | 1979-08-29 | Manufacture for magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10916679A JPS5634123A (en) | 1979-08-29 | 1979-08-29 | Manufacture for magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5634123A JPS5634123A (en) | 1981-04-06 |
| JPS6327768B2 true JPS6327768B2 (enrdf_load_stackoverflow) | 1988-06-06 |
Family
ID=14503318
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10916679A Granted JPS5634123A (en) | 1979-08-29 | 1979-08-29 | Manufacture for magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5634123A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04300483A (ja) * | 1991-03-28 | 1992-10-23 | Koguma Kikai Kk | 自動弁 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6276018A (ja) * | 1985-09-30 | 1987-04-08 | Tohoku Metal Ind Ltd | コンポジツト型磁気ヘツドの製造方法 |
| JPS62234214A (ja) * | 1986-04-03 | 1987-10-14 | Alps Electric Co Ltd | 磁気ヘツドの製造方法 |
-
1979
- 1979-08-29 JP JP10916679A patent/JPS5634123A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04300483A (ja) * | 1991-03-28 | 1992-10-23 | Koguma Kikai Kk | 自動弁 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5634123A (en) | 1981-04-06 |
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