JPS6326925Y2 - - Google Patents

Info

Publication number
JPS6326925Y2
JPS6326925Y2 JP1981110125U JP11012581U JPS6326925Y2 JP S6326925 Y2 JPS6326925 Y2 JP S6326925Y2 JP 1981110125 U JP1981110125 U JP 1981110125U JP 11012581 U JP11012581 U JP 11012581U JP S6326925 Y2 JPS6326925 Y2 JP S6326925Y2
Authority
JP
Japan
Prior art keywords
sample
electrons
electron
detector
energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981110125U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5823160U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11012581U priority Critical patent/JPS5823160U/ja
Publication of JPS5823160U publication Critical patent/JPS5823160U/ja
Application granted granted Critical
Publication of JPS6326925Y2 publication Critical patent/JPS6326925Y2/ja
Granted legal-status Critical Current

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Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP11012581U 1981-07-24 1981-07-24 電子プロ−ブ装置 Granted JPS5823160U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11012581U JPS5823160U (ja) 1981-07-24 1981-07-24 電子プロ−ブ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11012581U JPS5823160U (ja) 1981-07-24 1981-07-24 電子プロ−ブ装置

Publications (2)

Publication Number Publication Date
JPS5823160U JPS5823160U (ja) 1983-02-14
JPS6326925Y2 true JPS6326925Y2 (OSRAM) 1988-07-21

Family

ID=29904482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11012581U Granted JPS5823160U (ja) 1981-07-24 1981-07-24 電子プロ−ブ装置

Country Status (1)

Country Link
JP (1) JPS5823160U (OSRAM)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5217519B2 (OSRAM) * 1972-05-17 1977-05-16
JPS51117571A (en) * 1975-04-08 1976-10-15 Jeol Ltd Scanning electron microscope

Also Published As

Publication number Publication date
JPS5823160U (ja) 1983-02-14

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