JPS6326541B2 - - Google Patents

Info

Publication number
JPS6326541B2
JPS6326541B2 JP55071753A JP7175380A JPS6326541B2 JP S6326541 B2 JPS6326541 B2 JP S6326541B2 JP 55071753 A JP55071753 A JP 55071753A JP 7175380 A JP7175380 A JP 7175380A JP S6326541 B2 JPS6326541 B2 JP S6326541B2
Authority
JP
Japan
Prior art keywords
heat treatment
substrate
effect
single crystal
silicon single
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55071753A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56167335A (en
Inventor
Hideki Tsuya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP7175380A priority Critical patent/JPS56167335A/ja
Publication of JPS56167335A publication Critical patent/JPS56167335A/ja
Publication of JPS6326541B2 publication Critical patent/JPS6326541B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/90—

Landscapes

  • Bipolar Transistors (AREA)
JP7175380A 1980-05-29 1980-05-29 Manufacture of semiconductor device Granted JPS56167335A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7175380A JPS56167335A (en) 1980-05-29 1980-05-29 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7175380A JPS56167335A (en) 1980-05-29 1980-05-29 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS56167335A JPS56167335A (en) 1981-12-23
JPS6326541B2 true JPS6326541B2 (OSRAM) 1988-05-30

Family

ID=13469601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7175380A Granted JPS56167335A (en) 1980-05-29 1980-05-29 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS56167335A (OSRAM)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6012754A (ja) * 1983-07-01 1985-01-23 Matsushita Electric Ind Co Ltd 半導体装置の製造方法
JPS60136218A (ja) * 1983-12-23 1985-07-19 Nec Corp 半導体装置およびその製造方法
JPS61174197A (ja) * 1985-01-25 1986-08-05 Toshiba Ceramics Co Ltd エピタキシヤル・ウエ−ハの製造方法
JPH0350737A (ja) * 1989-07-18 1991-03-05 Nec Corp 半導体装置の製造方法
JP2705748B2 (ja) * 1993-08-30 1998-01-28 キヤノン株式会社 光電変換装置の製造方法

Also Published As

Publication number Publication date
JPS56167335A (en) 1981-12-23

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