JPS6258138B2 - - Google Patents

Info

Publication number
JPS6258138B2
JPS6258138B2 JP54144183A JP14418379A JPS6258138B2 JP S6258138 B2 JPS6258138 B2 JP S6258138B2 JP 54144183 A JP54144183 A JP 54144183A JP 14418379 A JP14418379 A JP 14418379A JP S6258138 B2 JPS6258138 B2 JP S6258138B2
Authority
JP
Japan
Prior art keywords
oxygen
heat treatment
defects
substrate
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54144183A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5667922A (en
Inventor
Hideki Tsuya
Yukinobu Tanno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO ERU ESU AI GIJUTSU KENKYU KUMIAI filed Critical CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority to JP14418379A priority Critical patent/JPS5667922A/ja
Publication of JPS5667922A publication Critical patent/JPS5667922A/ja
Publication of JPS6258138B2 publication Critical patent/JPS6258138B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/2905—
    • H10P14/24—
    • H10P14/3411—
JP14418379A 1979-11-07 1979-11-07 Preparation method of semiconductor system Granted JPS5667922A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14418379A JPS5667922A (en) 1979-11-07 1979-11-07 Preparation method of semiconductor system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14418379A JPS5667922A (en) 1979-11-07 1979-11-07 Preparation method of semiconductor system

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP27874488A Division JPH02177321A (ja) 1988-11-04 1988-11-04 半導体基板の製造方法

Publications (2)

Publication Number Publication Date
JPS5667922A JPS5667922A (en) 1981-06-08
JPS6258138B2 true JPS6258138B2 (OSRAM) 1987-12-04

Family

ID=15356120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14418379A Granted JPS5667922A (en) 1979-11-07 1979-11-07 Preparation method of semiconductor system

Country Status (1)

Country Link
JP (1) JPS5667922A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5994809A (ja) * 1982-11-22 1984-05-31 Fujitsu Ltd 半導体素子の製造方法
JPH01265525A (ja) * 1988-04-15 1989-10-23 Fujitsu Ltd 半導体基板の製造方法

Also Published As

Publication number Publication date
JPS5667922A (en) 1981-06-08

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