JPS6326343Y2 - - Google Patents

Info

Publication number
JPS6326343Y2
JPS6326343Y2 JP1982190044U JP19004482U JPS6326343Y2 JP S6326343 Y2 JPS6326343 Y2 JP S6326343Y2 JP 1982190044 U JP1982190044 U JP 1982190044U JP 19004482 U JP19004482 U JP 19004482U JP S6326343 Y2 JPS6326343 Y2 JP S6326343Y2
Authority
JP
Japan
Prior art keywords
area
conveyance
region
conveying
low
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982190044U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5995028U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19004482U priority Critical patent/JPS5995028U/ja
Publication of JPS5995028U publication Critical patent/JPS5995028U/ja
Application granted granted Critical
Publication of JPS6326343Y2 publication Critical patent/JPS6326343Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Mechanical Conveyors (AREA)
JP19004482U 1982-12-15 1982-12-15 搬送装置 Granted JPS5995028U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19004482U JPS5995028U (ja) 1982-12-15 1982-12-15 搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19004482U JPS5995028U (ja) 1982-12-15 1982-12-15 搬送装置

Publications (2)

Publication Number Publication Date
JPS5995028U JPS5995028U (ja) 1984-06-28
JPS6326343Y2 true JPS6326343Y2 (enEXAMPLES) 1988-07-18

Family

ID=30409575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19004482U Granted JPS5995028U (ja) 1982-12-15 1982-12-15 搬送装置

Country Status (1)

Country Link
JP (1) JPS5995028U (enEXAMPLES)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4869612B2 (ja) * 2005-03-25 2012-02-08 東京エレクトロン株式会社 基板搬送システムおよび基板搬送方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5349547Y2 (enEXAMPLES) * 1975-08-06 1978-11-28
JPS5375683A (en) * 1976-12-17 1978-07-05 Hitachi Ltd Wafer transporting apparatus
JPS5748520A (en) * 1980-09-03 1982-03-19 Shinko Electric Co Ltd Stop method for carrier in conveyor

Also Published As

Publication number Publication date
JPS5995028U (ja) 1984-06-28

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