JPS5748520A - Stop method for carrier in conveyor - Google Patents

Stop method for carrier in conveyor

Info

Publication number
JPS5748520A
JPS5748520A JP12274980A JP12274980A JPS5748520A JP S5748520 A JPS5748520 A JP S5748520A JP 12274980 A JP12274980 A JP 12274980A JP 12274980 A JP12274980 A JP 12274980A JP S5748520 A JPS5748520 A JP S5748520A
Authority
JP
Japan
Prior art keywords
carrier
air
stop
sucked
rails
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12274980A
Other languages
Japanese (ja)
Inventor
Atsuji Karita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Co Ltd
Original Assignee
Shinko Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Co Ltd filed Critical Shinko Electric Co Ltd
Priority to JP12274980A priority Critical patent/JPS5748520A/en
Publication of JPS5748520A publication Critical patent/JPS5748520A/en
Pending legal-status Critical Current

Links

Landscapes

  • Non-Mechanical Conveyors (AREA)
  • Control Of Conveyors (AREA)

Abstract

PURPOSE: To safely bring to a stop without shocks and reverse movement in such a way that supply of compressed air is interrupted, and air is sucked from rails, in a conveyor to drive a carrier by means that it is floated up by air pressure and based on the propulsive force of an induction linear motor.
CONSTITUTION: When air from a compressed air source 7 is pneumatically sent into rails 1 by releasing valves 8a, 8b, 8c, compressed air is blown out of an air hole 1a. Thus, a carrier 3 is floated up. Then when shifting magnetic field is brought out in (A) direction to the primary side 5a of a linear motor 5, the secondary side 5b and the carrier 3 which is incorporated with it are moved in (A) direction at the speed slower than that in the shifting magnetic field. When position of the carrier 3 lines in the section 1X2 of the rails 1, if at the same time as the valve 8b is closed, a valve 10b is opened, air in the section 1X2 is sucked, the carrier 3 is sucked in an air hole 1a and brought to a stop. In consequence, it does not give such a big shock as stop by a locating pin, and that it can stop at the determined position.
COPYRIGHT: (C)1982,JPO&Japio
JP12274980A 1980-09-03 1980-09-03 Stop method for carrier in conveyor Pending JPS5748520A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12274980A JPS5748520A (en) 1980-09-03 1980-09-03 Stop method for carrier in conveyor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12274980A JPS5748520A (en) 1980-09-03 1980-09-03 Stop method for carrier in conveyor

Publications (1)

Publication Number Publication Date
JPS5748520A true JPS5748520A (en) 1982-03-19

Family

ID=14843642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12274980A Pending JPS5748520A (en) 1980-09-03 1980-09-03 Stop method for carrier in conveyor

Country Status (1)

Country Link
JP (1) JPS5748520A (en)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5983828U (en) * 1982-11-29 1984-06-06 住友重機械工業株式会社 Non-magnetic metal plate conveyor using linear motor
JPS5995028U (en) * 1982-12-15 1984-06-28 日立機電工業株式会社 Conveyance device
JPS5995027U (en) * 1982-12-15 1984-06-28 日立機電工業株式会社 Conveyance device
JPS59124623A (en) * 1982-12-31 1984-07-18 Hitachi Kiden Kogyo Ltd Transport device
JPS6019616A (en) * 1983-07-14 1985-01-31 Hitachi Ltd Conveyance device
JPS6118303A (en) * 1984-07-02 1986-01-27 Hitachi Kiden Kogyo Ltd Conveying apparatus using linear motor
JPS6152555U (en) * 1984-09-12 1986-04-09
JPS6169604A (en) * 1984-09-10 1986-04-10 Mitsubishi Chem Ind Ltd Transfer apparatus
JPS61150925A (en) * 1985-11-05 1986-07-09 Hitachi Ltd Linear motor conveyor for wafer
JPS61236483A (en) * 1985-04-12 1986-10-21 株式会社日立製作所 Orthogonal type positioning device
JPS61169669U (en) * 1984-12-03 1986-10-21
US4805761A (en) * 1987-07-14 1989-02-21 Totsch John W Magnetic conveyor system for transporting wafers
US4848536A (en) * 1987-03-31 1989-07-18 Fujitsu Limited Apparatus for transporting an electrically conductive wafer
US5248236A (en) * 1990-08-08 1993-09-28 Mitsubishi Jukogyo Kabushiki Kaisha Transfer system and transfer pallet

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63656Y2 (en) * 1982-11-29 1988-01-08
JPS5983828U (en) * 1982-11-29 1984-06-06 住友重機械工業株式会社 Non-magnetic metal plate conveyor using linear motor
JPS5995028U (en) * 1982-12-15 1984-06-28 日立機電工業株式会社 Conveyance device
JPS5995027U (en) * 1982-12-15 1984-06-28 日立機電工業株式会社 Conveyance device
JPH0114577Y2 (en) * 1982-12-15 1989-04-28
JPS6326343Y2 (en) * 1982-12-15 1988-07-18
JPS59124623A (en) * 1982-12-31 1984-07-18 Hitachi Kiden Kogyo Ltd Transport device
JPH027848B2 (en) * 1982-12-31 1990-02-21 Hitachi Kiden Kogyo Kk
JPS6019616A (en) * 1983-07-14 1985-01-31 Hitachi Ltd Conveyance device
JPH0422812B2 (en) * 1983-07-14 1992-04-20 Hitachi Seisakusho Kk
JPS6118303A (en) * 1984-07-02 1986-01-27 Hitachi Kiden Kogyo Ltd Conveying apparatus using linear motor
JPS6169604A (en) * 1984-09-10 1986-04-10 Mitsubishi Chem Ind Ltd Transfer apparatus
JPS6152555U (en) * 1984-09-12 1986-04-09
JPS61169669U (en) * 1984-12-03 1986-10-21
JPS61236483A (en) * 1985-04-12 1986-10-21 株式会社日立製作所 Orthogonal type positioning device
JPS61150925A (en) * 1985-11-05 1986-07-09 Hitachi Ltd Linear motor conveyor for wafer
US4848536A (en) * 1987-03-31 1989-07-18 Fujitsu Limited Apparatus for transporting an electrically conductive wafer
US4805761A (en) * 1987-07-14 1989-02-21 Totsch John W Magnetic conveyor system for transporting wafers
US5248236A (en) * 1990-08-08 1993-09-28 Mitsubishi Jukogyo Kabushiki Kaisha Transfer system and transfer pallet

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