JPS5995028U - Conveyance device - Google Patents
Conveyance deviceInfo
- Publication number
- JPS5995028U JPS5995028U JP19004482U JP19004482U JPS5995028U JP S5995028 U JPS5995028 U JP S5995028U JP 19004482 U JP19004482 U JP 19004482U JP 19004482 U JP19004482 U JP 19004482U JP S5995028 U JPS5995028 U JP S5995028U
- Authority
- JP
- Japan
- Prior art keywords
- conveyance
- air duct
- pressure air
- conveyance device
- platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Non-Mechanical Conveyors (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の搬送装置の概略断面図、第２凶は同装置
の一部平面図、第３図は同装置における搬送管路内の空
気の流れを示す概略図、第４図は二 本考案による一
実施例の搬送装置の概略断面図で） ある。
Ｌ １・・・・・・搬送管路、２・・・・・・搬送
台、３・・・・・・被搬送二 物、４・・・・・・搬
送テーブル、５・・曲駆動コイル、６゜１１．１３．１
３’・・・・・・ノズル、７・・・・・・コンプレッサ
ー、８・・・・パ・高圧ニーアダクト、９・・曲排気フ
ァコ ン、１２・・・・・・低圧エアダクト。Figure 1 is a schematic sectional view of a conventional conveyance device, Figure 2 is a partial plan view of the same device, Figure 3 is a schematic diagram showing the flow of air in the conveyance pipe in the same device, and Figure 4 is a two-dimensional diagram. 1 is a schematic cross-sectional view of an embodiment of a conveying device according to the present invention. L 1... Conveyance pipe line, 2... Conveyance platform, 3... Two objects to be conveyed, 4... Conveyance table, 5... Curved drive coil , 6°11.13.1
3'... Nozzle, 7... Compressor, 8... Pa high pressure knee duct, 9... Bent exhaust fan, 12... Low pressure air duct.
Claims (1)
圧エアダクトを具備する搬送装置におして、搬送経路に
前記高圧エアダクトから送出さｉする空気を吸入するた
めの低圧エアダクトを設は六ことを特徴とする搬送装置
。In a conveyance device equipped with a conveyance platform on which a transported object is placed and a high-pressure air duct that floats the conveyance platform, a low-pressure air duct for sucking air sent out from the high-pressure air duct is installed in the conveyance path. A conveying device characterized by six things.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19004482U JPS5995028U (en) | 1982-12-15 | 1982-12-15 | Conveyance device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19004482U JPS5995028U (en) | 1982-12-15 | 1982-12-15 | Conveyance device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5995028U true JPS5995028U (en) | 1984-06-28 |
| JPS6326343Y2 JPS6326343Y2 (en) | 1988-07-18 |
Family
ID=30409575
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19004482U Granted JPS5995028U (en) | 1982-12-15 | 1982-12-15 | Conveyance device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5995028U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006264939A (en) * | 2005-03-25 | 2006-10-05 | Tokyo Electron Ltd | Substrate conveying system and substrate conveying method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5223831U (en) * | 1975-08-06 | 1977-02-19 | ||
| JPS5375683A (en) * | 1976-12-17 | 1978-07-05 | Hitachi Ltd | Wafer transporting apparatus |
| JPS5748520A (en) * | 1980-09-03 | 1982-03-19 | Shinko Electric Co Ltd | Stop method for carrier in conveyor |
-
1982
- 1982-12-15 JP JP19004482U patent/JPS5995028U/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5223831U (en) * | 1975-08-06 | 1977-02-19 | ||
| JPS5375683A (en) * | 1976-12-17 | 1978-07-05 | Hitachi Ltd | Wafer transporting apparatus |
| JPS5748520A (en) * | 1980-09-03 | 1982-03-19 | Shinko Electric Co Ltd | Stop method for carrier in conveyor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006264939A (en) * | 2005-03-25 | 2006-10-05 | Tokyo Electron Ltd | Substrate conveying system and substrate conveying method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6326343Y2 (en) | 1988-07-18 |
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