JPS58195092U - Vacuum pump protection device - Google Patents

Vacuum pump protection device

Info

Publication number
JPS58195092U
JPS58195092U JP9353582U JP9353582U JPS58195092U JP S58195092 U JPS58195092 U JP S58195092U JP 9353582 U JP9353582 U JP 9353582U JP 9353582 U JP9353582 U JP 9353582U JP S58195092 U JPS58195092 U JP S58195092U
Authority
JP
Japan
Prior art keywords
vacuum pump
protection device
pump protection
opened
closed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9353582U
Other languages
Japanese (ja)
Inventor
樫本　久生
Original Assignee
住友金属工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 住友金属工業株式会社 filed Critical 住友金属工業株式会社
Priority to JP9353582U priority Critical patent/JPS58195092U/en
Publication of JPS58195092U publication Critical patent/JPS58195092U/en
Pending legal-status Critical Current

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  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の真空ポンプの保護装置の配設態様を示
す系統図、第２図は真空ポンプの構造を示す断面図であ
る。 １・・・ＶＡＤ炉、２Ａ〜２Ｅ・・・エジェクター、３
Ａ〜３Ｄ・・・コンデンサー、４・・・真空ポンプ、５
・・・逆止弁、８・・・給水源、２０・・・仕切弁、２
１・・・大気開放弁、２２・・・液面計。FIG. 1 is a system diagram showing the arrangement of the vacuum pump protection device of the present invention, and FIG. 2 is a sectional view showing the structure of the vacuum pump. 1...VAD furnace, 2A-2E...ejector, 3
A~3D...Condenser, 4...Vacuum pump, 5
...Check valve, 8...Water supply source, 20...Gate valve, 2
1...Atmospheric release valve, 22...Liquid level gauge.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 上流側にガス吸引手段を有し下流側に液封式真空ポンプ
が配された真空設備において、前記ガス吸引手段と真空
ポンプとの間に開閉可能な仕切弁を設け、この仕切弁と
真空ポンプとの間に開閉可能な大気開放弁を設けたこと
を特徴とする真空ポンプの保護装置。In vacuum equipment in which a gas suction means is provided on the upstream side and a liquid ring vacuum pump is arranged on the downstream side, a gate valve that can be opened and closed is provided between the gas suction means and the vacuum pump, and the gate valve and the vacuum pump A vacuum pump protection device characterized by having an atmosphere release valve that can be opened and closed between the vacuum pump and the vacuum pump.
JP9353582U 1982-06-22 1982-06-22 Vacuum pump protection device Pending JPS58195092U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9353582U JPS58195092U (en) 1982-06-22 1982-06-22 Vacuum pump protection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9353582U JPS58195092U (en) 1982-06-22 1982-06-22 Vacuum pump protection device

Publications (1)

Publication Number Publication Date
JPS58195092U true JPS58195092U (en) 1983-12-24

Family

ID=30224408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9353582U Pending JPS58195092U (en) 1982-06-22 1982-06-22 Vacuum pump protection device

Country Status (1)

Country Link
JP (1) JPS58195092U (en)

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