JPS6324952B2 - - Google Patents

Info

Publication number
JPS6324952B2
JPS6324952B2 JP58241288A JP24128883A JPS6324952B2 JP S6324952 B2 JPS6324952 B2 JP S6324952B2 JP 58241288 A JP58241288 A JP 58241288A JP 24128883 A JP24128883 A JP 24128883A JP S6324952 B2 JPS6324952 B2 JP S6324952B2
Authority
JP
Japan
Prior art keywords
silicon carbide
boron
less
sintered body
sintered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58241288A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60131863A (ja
Inventor
Jinichiro Suzuki
Takashi Tode
Tatsuhiko Motomya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
Original Assignee
Shin-Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co Ltd filed Critical Shin-Etsu Chemical Co Ltd
Priority to JP58241288A priority Critical patent/JPS60131863A/ja
Publication of JPS60131863A publication Critical patent/JPS60131863A/ja
Publication of JPS6324952B2 publication Critical patent/JPS6324952B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
  • Inorganic Insulating Materials (AREA)
JP58241288A 1983-12-20 1983-12-20 電気絶縁性炭化けい素焼結体 Granted JPS60131863A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58241288A JPS60131863A (ja) 1983-12-20 1983-12-20 電気絶縁性炭化けい素焼結体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58241288A JPS60131863A (ja) 1983-12-20 1983-12-20 電気絶縁性炭化けい素焼結体

Publications (2)

Publication Number Publication Date
JPS60131863A JPS60131863A (ja) 1985-07-13
JPS6324952B2 true JPS6324952B2 (enExample) 1988-05-23

Family

ID=17072033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58241288A Granted JPS60131863A (ja) 1983-12-20 1983-12-20 電気絶縁性炭化けい素焼結体

Country Status (1)

Country Link
JP (1) JPS60131863A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6414174A (en) * 1987-07-06 1989-01-18 Ngk Insulators Ltd Silicon carbide sintered body and its production
JP4495840B2 (ja) * 2000-08-11 2010-07-07 住友大阪セメント株式会社 高周波透過材料の製造方法
JP4145097B2 (ja) * 2001-08-20 2008-09-03 日本碍子株式会社 低誘電正接材料および炭化珪素焼結体の誘電正接を制御する方法
JP5751917B2 (ja) * 2011-04-28 2015-07-22 京セラ株式会社 炭化珪素質焼結体およびこの炭化珪素質焼結体からなる静電吸着部材ならびに半導体製造装置用部材

Also Published As

Publication number Publication date
JPS60131863A (ja) 1985-07-13

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