JPS6324884B2 - - Google Patents
Info
- Publication number
- JPS6324884B2 JPS6324884B2 JP54146283A JP14628379A JPS6324884B2 JP S6324884 B2 JPS6324884 B2 JP S6324884B2 JP 54146283 A JP54146283 A JP 54146283A JP 14628379 A JP14628379 A JP 14628379A JP S6324884 B2 JPS6324884 B2 JP S6324884B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- carry
- supply
- feeder
- lead frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
- Warehouses Or Storage Devices (AREA)
- Branching, Merging, And Special Transfer Between Conveyors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14628379A JPS5681402A (en) | 1979-11-12 | 1979-11-12 | Apparatus for feeding and carrying-out of sample |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14628379A JPS5681402A (en) | 1979-11-12 | 1979-11-12 | Apparatus for feeding and carrying-out of sample |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5681402A JPS5681402A (en) | 1981-07-03 |
JPS6324884B2 true JPS6324884B2 (enrdf_load_stackoverflow) | 1988-05-23 |
Family
ID=15404201
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14628379A Granted JPS5681402A (en) | 1979-11-12 | 1979-11-12 | Apparatus for feeding and carrying-out of sample |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5681402A (enrdf_load_stackoverflow) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5999734A (ja) * | 1982-11-30 | 1984-06-08 | Nec Corp | ウエ−ハ搬送装置 |
JPS60132832A (ja) * | 1983-12-20 | 1985-07-15 | Tokico Ltd | 基板搬送装置 |
JPH06102484B2 (ja) * | 1987-07-17 | 1994-12-14 | 三洋電機株式会社 | 基板搬送装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52154370A (en) * | 1976-06-18 | 1977-12-22 | Hitachi Ltd | Photo resist film treatment apparatus of semiconductor wafers |
JPS5467976A (en) * | 1977-11-08 | 1979-05-31 | Toshiba Seiki Kk | Apparatus for supplying and receiving article |
-
1979
- 1979-11-12 JP JP14628379A patent/JPS5681402A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5681402A (en) | 1981-07-03 |
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