JPS5681402A - Apparatus for feeding and carrying-out of sample - Google Patents

Apparatus for feeding and carrying-out of sample

Info

Publication number
JPS5681402A
JPS5681402A JP14628379A JP14628379A JPS5681402A JP S5681402 A JPS5681402 A JP S5681402A JP 14628379 A JP14628379 A JP 14628379A JP 14628379 A JP14628379 A JP 14628379A JP S5681402 A JPS5681402 A JP S5681402A
Authority
JP
Japan
Prior art keywords
lead frame
constitution
transferred
rotary table
guiding passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14628379A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6324884B2 (enrdf_load_stackoverflow
Inventor
Yoshimitsu Terakado
Toru Takamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinkawa Ltd
Original Assignee
Shinkawa Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinkawa Ltd filed Critical Shinkawa Ltd
Priority to JP14628379A priority Critical patent/JPS5681402A/ja
Publication of JPS5681402A publication Critical patent/JPS5681402A/ja
Publication of JPS6324884B2 publication Critical patent/JPS6324884B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Branching, Merging, And Special Transfer Between Conveyors (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Warehouses Or Storage Devices (AREA)
JP14628379A 1979-11-12 1979-11-12 Apparatus for feeding and carrying-out of sample Granted JPS5681402A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14628379A JPS5681402A (en) 1979-11-12 1979-11-12 Apparatus for feeding and carrying-out of sample

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14628379A JPS5681402A (en) 1979-11-12 1979-11-12 Apparatus for feeding and carrying-out of sample

Publications (2)

Publication Number Publication Date
JPS5681402A true JPS5681402A (en) 1981-07-03
JPS6324884B2 JPS6324884B2 (enrdf_load_stackoverflow) 1988-05-23

Family

ID=15404201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14628379A Granted JPS5681402A (en) 1979-11-12 1979-11-12 Apparatus for feeding and carrying-out of sample

Country Status (1)

Country Link
JP (1) JPS5681402A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5999734A (ja) * 1982-11-30 1984-06-08 Nec Corp ウエ−ハ搬送装置
JPS60132832A (ja) * 1983-12-20 1985-07-15 Tokico Ltd 基板搬送装置
JPS6422719A (en) * 1987-07-17 1989-01-25 Sanyo Electric Co Substrate carrier

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52154370A (en) * 1976-06-18 1977-12-22 Hitachi Ltd Photo resist film treatment apparatus of semiconductor wafers
JPS5467976A (en) * 1977-11-08 1979-05-31 Toshiba Seiki Kk Apparatus for supplying and receiving article

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52154370A (en) * 1976-06-18 1977-12-22 Hitachi Ltd Photo resist film treatment apparatus of semiconductor wafers
JPS5467976A (en) * 1977-11-08 1979-05-31 Toshiba Seiki Kk Apparatus for supplying and receiving article

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5999734A (ja) * 1982-11-30 1984-06-08 Nec Corp ウエ−ハ搬送装置
JPS60132832A (ja) * 1983-12-20 1985-07-15 Tokico Ltd 基板搬送装置
JPS6422719A (en) * 1987-07-17 1989-01-25 Sanyo Electric Co Substrate carrier

Also Published As

Publication number Publication date
JPS6324884B2 (enrdf_load_stackoverflow) 1988-05-23

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