JPS632442Y2 - - Google Patents
Info
- Publication number
- JPS632442Y2 JPS632442Y2 JP10206983U JP10206983U JPS632442Y2 JP S632442 Y2 JPS632442 Y2 JP S632442Y2 JP 10206983 U JP10206983 U JP 10206983U JP 10206983 U JP10206983 U JP 10206983U JP S632442 Y2 JPS632442 Y2 JP S632442Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- reaction tube
- quartz reaction
- vapor phase
- phase growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006243 chemical reaction Methods 0.000 claims description 19
- 239000010453 quartz Substances 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 238000001947 vapour-phase growth Methods 0.000 claims description 11
- 238000001816 cooling Methods 0.000 claims description 7
- 239000013067 intermediate product Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 28
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 10
- 229910002804 graphite Inorganic materials 0.000 description 10
- 239000010439 graphite Substances 0.000 description 10
- 239000000498 cooling water Substances 0.000 description 8
- 239000000758 substrate Substances 0.000 description 6
- 239000002994 raw material Substances 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10206983U JPS6013970U (ja) | 1983-07-02 | 1983-07-02 | 気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10206983U JPS6013970U (ja) | 1983-07-02 | 1983-07-02 | 気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6013970U JPS6013970U (ja) | 1985-01-30 |
| JPS632442Y2 true JPS632442Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-01-21 |
Family
ID=30240761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10206983U Granted JPS6013970U (ja) | 1983-07-02 | 1983-07-02 | 気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6013970U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1983
- 1983-07-02 JP JP10206983U patent/JPS6013970U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6013970U (ja) | 1985-01-30 |