JPS6324276U - - Google Patents
Info
- Publication number
- JPS6324276U JPS6324276U JP11742286U JP11742286U JPS6324276U JP S6324276 U JPS6324276 U JP S6324276U JP 11742286 U JP11742286 U JP 11742286U JP 11742286 U JP11742286 U JP 11742286U JP S6324276 U JPS6324276 U JP S6324276U
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- phase growth
- nozzle
- etching
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 claims description 10
- 238000001947 vapour-phase growth Methods 0.000 claims description 9
- 230000037431 insertion Effects 0.000 claims description 3
- 238000003780 insertion Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 241000973497 Siphonognathus argyrophanes Species 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11742286U JPH0345956Y2 (enrdf_load_stackoverflow) | 1986-08-01 | 1986-08-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11742286U JPH0345956Y2 (enrdf_load_stackoverflow) | 1986-08-01 | 1986-08-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6324276U true JPS6324276U (enrdf_load_stackoverflow) | 1988-02-17 |
| JPH0345956Y2 JPH0345956Y2 (enrdf_load_stackoverflow) | 1991-09-27 |
Family
ID=31002918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11742286U Expired JPH0345956Y2 (enrdf_load_stackoverflow) | 1986-08-01 | 1986-08-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0345956Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-08-01 JP JP11742286U patent/JPH0345956Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0345956Y2 (enrdf_load_stackoverflow) | 1991-09-27 |
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