JPH0345956Y2 - - Google Patents

Info

Publication number
JPH0345956Y2
JPH0345956Y2 JP11742286U JP11742286U JPH0345956Y2 JP H0345956 Y2 JPH0345956 Y2 JP H0345956Y2 JP 11742286 U JP11742286 U JP 11742286U JP 11742286 U JP11742286 U JP 11742286U JP H0345956 Y2 JPH0345956 Y2 JP H0345956Y2
Authority
JP
Japan
Prior art keywords
gas
etching
nozzle
vapor phase
phase growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11742286U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6324276U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11742286U priority Critical patent/JPH0345956Y2/ja
Publication of JPS6324276U publication Critical patent/JPS6324276U/ja
Application granted granted Critical
Publication of JPH0345956Y2 publication Critical patent/JPH0345956Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP11742286U 1986-08-01 1986-08-01 Expired JPH0345956Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11742286U JPH0345956Y2 (enrdf_load_stackoverflow) 1986-08-01 1986-08-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11742286U JPH0345956Y2 (enrdf_load_stackoverflow) 1986-08-01 1986-08-01

Publications (2)

Publication Number Publication Date
JPS6324276U JPS6324276U (enrdf_load_stackoverflow) 1988-02-17
JPH0345956Y2 true JPH0345956Y2 (enrdf_load_stackoverflow) 1991-09-27

Family

ID=31002918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11742286U Expired JPH0345956Y2 (enrdf_load_stackoverflow) 1986-08-01 1986-08-01

Country Status (1)

Country Link
JP (1) JPH0345956Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6324276U (enrdf_load_stackoverflow) 1988-02-17

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