JPS6324069B2 - - Google Patents
Info
- Publication number
- JPS6324069B2 JPS6324069B2 JP3288485A JP3288485A JPS6324069B2 JP S6324069 B2 JPS6324069 B2 JP S6324069B2 JP 3288485 A JP3288485 A JP 3288485A JP 3288485 A JP3288485 A JP 3288485A JP S6324069 B2 JPS6324069 B2 JP S6324069B2
- Authority
- JP
- Japan
- Prior art keywords
- quartz plate
- gas
- gas introduction
- substrate
- introduction pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 48
- 239000010453 quartz Substances 0.000 claims description 46
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 46
- 239000002994 raw material Substances 0.000 claims description 14
- 230000012010 growth Effects 0.000 claims description 10
- 238000005229 chemical vapour deposition Methods 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 3
- 239000012808 vapor phase Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 73
- 229910004298 SiO 2 Inorganic materials 0.000 description 13
- 239000002131 composite material Substances 0.000 description 7
- HQWPLXHWEZZGKY-UHFFFAOYSA-N diethylzinc Chemical compound CC[Zn]CC HQWPLXHWEZZGKY-UHFFFAOYSA-N 0.000 description 7
- AXAZMDOAUQTMOW-UHFFFAOYSA-N dimethylzinc Chemical compound C[Zn]C AXAZMDOAUQTMOW-UHFFFAOYSA-N 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 4
- 229910000077 silane Inorganic materials 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000004453 electron probe microanalysis Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3288485A JPS61194178A (ja) | 1985-02-22 | 1985-02-22 | 化学気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3288485A JPS61194178A (ja) | 1985-02-22 | 1985-02-22 | 化学気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61194178A JPS61194178A (ja) | 1986-08-28 |
| JPS6324069B2 true JPS6324069B2 (enExample) | 1988-05-19 |
Family
ID=12371297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3288485A Granted JPS61194178A (ja) | 1985-02-22 | 1985-02-22 | 化学気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61194178A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01176294A (ja) * | 1987-12-29 | 1989-07-12 | Nec Corp | 気相成長装置 |
| JP3791432B2 (ja) * | 2002-02-27 | 2006-06-28 | 住友電気工業株式会社 | 半導体製造用加熱装置 |
-
1985
- 1985-02-22 JP JP3288485A patent/JPS61194178A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61194178A (ja) | 1986-08-28 |
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