JPS6323704Y2 - - Google Patents

Info

Publication number
JPS6323704Y2
JPS6323704Y2 JP1985081409U JP8140985U JPS6323704Y2 JP S6323704 Y2 JPS6323704 Y2 JP S6323704Y2 JP 1985081409 U JP1985081409 U JP 1985081409U JP 8140985 U JP8140985 U JP 8140985U JP S6323704 Y2 JPS6323704 Y2 JP S6323704Y2
Authority
JP
Japan
Prior art keywords
pellicle
mask
pellicle frame
view
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985081409U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6258455U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985081409U priority Critical patent/JPS6323704Y2/ja
Publication of JPS6258455U publication Critical patent/JPS6258455U/ja
Application granted granted Critical
Publication of JPS6323704Y2 publication Critical patent/JPS6323704Y2/ja
Expired legal-status Critical Current

Links

JP1985081409U 1985-05-30 1985-05-30 Expired JPS6323704Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985081409U JPS6323704Y2 (OSRAM) 1985-05-30 1985-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985081409U JPS6323704Y2 (OSRAM) 1985-05-30 1985-05-30

Publications (2)

Publication Number Publication Date
JPS6258455U JPS6258455U (OSRAM) 1987-04-11
JPS6323704Y2 true JPS6323704Y2 (OSRAM) 1988-06-29

Family

ID=30933117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985081409U Expired JPS6323704Y2 (OSRAM) 1985-05-30 1985-05-30

Country Status (1)

Country Link
JP (1) JPS6323704Y2 (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5668346B2 (ja) * 2010-07-14 2015-02-12 凸版印刷株式会社 ペリクルのフォトマスクへの取り付け構造
JP5984187B2 (ja) * 2013-04-22 2016-09-06 信越化学工業株式会社 ペリクルとフォトマスクのアセンブリ
JP6837433B2 (ja) * 2014-11-17 2021-03-03 エーエスエムエル ネザーランズ ビー．ブイ． ペリクル取り付け装置及びペリクル取り付け方法
JP2017083791A (ja) * 2015-10-30 2017-05-18 三井化学株式会社 ペリクル、ペリクルの製造方法及びペリクルを用いた露光方法

Also Published As

Publication number Publication date
JPS6258455U (OSRAM) 1987-04-11

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