JPS6323647B2 - - Google Patents

Info

Publication number
JPS6323647B2
JPS6323647B2 JP20075583A JP20075583A JPS6323647B2 JP S6323647 B2 JPS6323647 B2 JP S6323647B2 JP 20075583 A JP20075583 A JP 20075583A JP 20075583 A JP20075583 A JP 20075583A JP S6323647 B2 JPS6323647 B2 JP S6323647B2
Authority
JP
Japan
Prior art keywords
thin film
capacitor
dielectric
srtio
lower electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP20075583A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6094716A (ja
Inventor
Takashi Inukai
Toshiaki Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP20075583A priority Critical patent/JPS6094716A/ja
Publication of JPS6094716A publication Critical patent/JPS6094716A/ja
Publication of JPS6323647B2 publication Critical patent/JPS6323647B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Capacitors (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
JP20075583A 1983-10-28 1983-10-28 薄膜コンデンサ Granted JPS6094716A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20075583A JPS6094716A (ja) 1983-10-28 1983-10-28 薄膜コンデンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20075583A JPS6094716A (ja) 1983-10-28 1983-10-28 薄膜コンデンサ

Publications (2)

Publication Number Publication Date
JPS6094716A JPS6094716A (ja) 1985-05-27
JPS6323647B2 true JPS6323647B2 (cg-RX-API-DMAC7.html) 1988-05-17

Family

ID=16429634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20075583A Granted JPS6094716A (ja) 1983-10-28 1983-10-28 薄膜コンデンサ

Country Status (1)

Country Link
JP (1) JPS6094716A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02117003U (cg-RX-API-DMAC7.html) * 1989-03-01 1990-09-19

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02121313A (ja) * 1988-10-29 1990-05-09 Matsushita Electric Ind Co Ltd 多層薄膜コンデンサ
JPH0687493B2 (ja) * 1990-03-07 1994-11-02 日本電気株式会社 薄膜コンデンサ
JPH09139480A (ja) * 1995-01-27 1997-05-27 Toshiba Corp 薄膜キャパシタおよびこれを用いた半導体記憶装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02117003U (cg-RX-API-DMAC7.html) * 1989-03-01 1990-09-19

Also Published As

Publication number Publication date
JPS6094716A (ja) 1985-05-27

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