JPS632362B2 - - Google Patents
Info
- Publication number
- JPS632362B2 JPS632362B2 JP11986481A JP11986481A JPS632362B2 JP S632362 B2 JPS632362 B2 JP S632362B2 JP 11986481 A JP11986481 A JP 11986481A JP 11986481 A JP11986481 A JP 11986481A JP S632362 B2 JPS632362 B2 JP S632362B2
- Authority
- JP
- Japan
- Prior art keywords
- dielectric
- center electrode
- present
- electrode film
- full
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000003989 dielectric material Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 230000005855 radiation Effects 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P3/00—Waveguides; Transmission lines of the waveguide type
- H01P3/02—Waveguides; Transmission lines of the waveguide type with two longitudinal conductors
- H01P3/08—Microstrips; Strip lines
- H01P3/085—Triplate lines
Landscapes
- Waveguides (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11986481A JPS5820003A (ja) | 1981-07-29 | 1981-07-29 | ストリツプラインの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11986481A JPS5820003A (ja) | 1981-07-29 | 1981-07-29 | ストリツプラインの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5820003A JPS5820003A (ja) | 1983-02-05 |
| JPS632362B2 true JPS632362B2 (enrdf_load_stackoverflow) | 1988-01-19 |
Family
ID=14772154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11986481A Granted JPS5820003A (ja) | 1981-07-29 | 1981-07-29 | ストリツプラインの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5820003A (enrdf_load_stackoverflow) |
-
1981
- 1981-07-29 JP JP11986481A patent/JPS5820003A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5820003A (ja) | 1983-02-05 |
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