JPS63229864A - 陽極接合方法 - Google Patents
陽極接合方法Info
- Publication number
- JPS63229864A JPS63229864A JP6487987A JP6487987A JPS63229864A JP S63229864 A JPS63229864 A JP S63229864A JP 6487987 A JP6487987 A JP 6487987A JP 6487987 A JP6487987 A JP 6487987A JP S63229864 A JPS63229864 A JP S63229864A
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- insulating material
- alkali
- anode
- brought
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Ceramic Products (AREA)
- Joining Of Glass To Other Materials (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6487987A JPS63229864A (ja) | 1987-03-19 | 1987-03-19 | 陽極接合方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6487987A JPS63229864A (ja) | 1987-03-19 | 1987-03-19 | 陽極接合方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63229864A true JPS63229864A (ja) | 1988-09-26 |
JPH0577306B2 JPH0577306B2 (cs) | 1993-10-26 |
Family
ID=13270845
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6487987A Granted JPS63229864A (ja) | 1987-03-19 | 1987-03-19 | 陽極接合方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63229864A (cs) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02141442A (ja) * | 1988-11-21 | 1990-05-30 | Mitsubishi Electric Corp | シリコンウエハとガラス基板の陽極接合法 |
-
1987
- 1987-03-19 JP JP6487987A patent/JPS63229864A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02141442A (ja) * | 1988-11-21 | 1990-05-30 | Mitsubishi Electric Corp | シリコンウエハとガラス基板の陽極接合法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0577306B2 (cs) | 1993-10-26 |
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