JPS6322171B2 - - Google Patents

Info

Publication number
JPS6322171B2
JPS6322171B2 JP59094611A JP9461184A JPS6322171B2 JP S6322171 B2 JPS6322171 B2 JP S6322171B2 JP 59094611 A JP59094611 A JP 59094611A JP 9461184 A JP9461184 A JP 9461184A JP S6322171 B2 JPS6322171 B2 JP S6322171B2
Authority
JP
Japan
Prior art keywords
gas
inert gas
cooling
vacuum
cooling pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59094611A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60238131A (ja
Inventor
Masayuki Inaba
Shigeru Akutsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuda Seisakusho Co Ltd
Original Assignee
Tokuda Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuda Seisakusho Co Ltd filed Critical Tokuda Seisakusho Co Ltd
Priority to JP9461184A priority Critical patent/JPS60238131A/ja
Publication of JPS60238131A publication Critical patent/JPS60238131A/ja
Publication of JPS6322171B2 publication Critical patent/JPS6322171B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Furnace Details (AREA)
JP9461184A 1984-05-14 1984-05-14 真空処理装置 Granted JPS60238131A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9461184A JPS60238131A (ja) 1984-05-14 1984-05-14 真空処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9461184A JPS60238131A (ja) 1984-05-14 1984-05-14 真空処理装置

Publications (2)

Publication Number Publication Date
JPS60238131A JPS60238131A (ja) 1985-11-27
JPS6322171B2 true JPS6322171B2 (cg-RX-API-DMAC7.html) 1988-05-11

Family

ID=14115040

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9461184A Granted JPS60238131A (ja) 1984-05-14 1984-05-14 真空処理装置

Country Status (1)

Country Link
JP (1) JPS60238131A (cg-RX-API-DMAC7.html)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51101783A (ja) * 1975-03-05 1976-09-08 Ulvac Corp Shinkushorisochi

Also Published As

Publication number Publication date
JPS60238131A (ja) 1985-11-27

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term