JPS60238131A - 真空処理装置 - Google Patents
真空処理装置Info
- Publication number
- JPS60238131A JPS60238131A JP9461184A JP9461184A JPS60238131A JP S60238131 A JPS60238131 A JP S60238131A JP 9461184 A JP9461184 A JP 9461184A JP 9461184 A JP9461184 A JP 9461184A JP S60238131 A JPS60238131 A JP S60238131A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- inert gas
- cooling
- cooled
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009489 vacuum treatment Methods 0.000 title abstract description 5
- 239000007789 gas Substances 0.000 claims abstract description 44
- 238000001816 cooling Methods 0.000 claims abstract description 41
- 239000011261 inert gas Substances 0.000 claims abstract description 37
- 239000000463 material Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 3
- 238000004904 shortening Methods 0.000 abstract description 3
- 239000000126 substance Substances 0.000 abstract 3
- 239000002826 coolant Substances 0.000 abstract 1
- 230000003134 recirculating effect Effects 0.000 abstract 1
- 230000000630 rising effect Effects 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 description 6
- 239000003507 refrigerant Substances 0.000 description 3
- 230000005855 radiation Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9461184A JPS60238131A (ja) | 1984-05-14 | 1984-05-14 | 真空処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9461184A JPS60238131A (ja) | 1984-05-14 | 1984-05-14 | 真空処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60238131A true JPS60238131A (ja) | 1985-11-27 |
| JPS6322171B2 JPS6322171B2 (cg-RX-API-DMAC7.html) | 1988-05-11 |
Family
ID=14115040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9461184A Granted JPS60238131A (ja) | 1984-05-14 | 1984-05-14 | 真空処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60238131A (cg-RX-API-DMAC7.html) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51101783A (ja) * | 1975-03-05 | 1976-09-08 | Ulvac Corp | Shinkushorisochi |
-
1984
- 1984-05-14 JP JP9461184A patent/JPS60238131A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51101783A (ja) * | 1975-03-05 | 1976-09-08 | Ulvac Corp | Shinkushorisochi |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6322171B2 (cg-RX-API-DMAC7.html) | 1988-05-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |