JPS632087B2 - - Google Patents
Info
- Publication number
- JPS632087B2 JPS632087B2 JP57193067A JP19306782A JPS632087B2 JP S632087 B2 JPS632087 B2 JP S632087B2 JP 57193067 A JP57193067 A JP 57193067A JP 19306782 A JP19306782 A JP 19306782A JP S632087 B2 JPS632087 B2 JP S632087B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- optical axis
- catadioptric
- optical system
- incident
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 75
- 238000006243 chemical reaction Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 description 9
- 239000011521 glass Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19306782A JPS5983116A (ja) | 1982-11-02 | 1982-11-02 | 光学系の調整装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19306782A JPS5983116A (ja) | 1982-11-02 | 1982-11-02 | 光学系の調整装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5983116A JPS5983116A (ja) | 1984-05-14 |
JPS632087B2 true JPS632087B2 (ko) | 1988-01-16 |
Family
ID=16301649
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19306782A Granted JPS5983116A (ja) | 1982-11-02 | 1982-11-02 | 光学系の調整装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5983116A (ko) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0512753Y2 (ko) * | 1986-09-30 | 1993-04-02 | ||
CN104296654B (zh) * | 2014-09-26 | 2017-06-09 | 中国科学院光电研究院 | 激光跟踪仪位置探测器零位安装误差的检测装置和方法 |
CN117073586B (zh) * | 2023-10-17 | 2024-01-09 | 青岛迈朗格智能制造有限公司 | 一种同轴双轴转台机械轴平行度检测装置及方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4884626A (ko) * | 1972-02-08 | 1973-11-10 | ||
JPS567246A (en) * | 1979-06-25 | 1981-01-24 | Olympus Optical Co Ltd | Method and unit for focus detection |
-
1982
- 1982-11-02 JP JP19306782A patent/JPS5983116A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4884626A (ko) * | 1972-02-08 | 1973-11-10 | ||
JPS567246A (en) * | 1979-06-25 | 1981-01-24 | Olympus Optical Co Ltd | Method and unit for focus detection |
Also Published As
Publication number | Publication date |
---|---|
JPS5983116A (ja) | 1984-05-14 |
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