JPS6320381B2 - - Google Patents

Info

Publication number
JPS6320381B2
JPS6320381B2 JP56182717A JP18271781A JPS6320381B2 JP S6320381 B2 JPS6320381 B2 JP S6320381B2 JP 56182717 A JP56182717 A JP 56182717A JP 18271781 A JP18271781 A JP 18271781A JP S6320381 B2 JPS6320381 B2 JP S6320381B2
Authority
JP
Japan
Prior art keywords
sheet
wafer
workpiece
stage
punch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56182717A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5884440A (ja
Inventor
Tomonoshin Nasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
Original Assignee
NEC Home Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd filed Critical NEC Home Electronics Ltd
Priority to JP56182717A priority Critical patent/JPS5884440A/ja
Publication of JPS5884440A publication Critical patent/JPS5884440A/ja
Publication of JPS6320381B2 publication Critical patent/JPS6320381B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0441—Apparatus for sealing, encapsulating, glassing, decapsulating or the like

Landscapes

  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP56182717A 1981-11-14 1981-11-14 シ−ト貼付方法 Granted JPS5884440A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56182717A JPS5884440A (ja) 1981-11-14 1981-11-14 シ−ト貼付方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56182717A JPS5884440A (ja) 1981-11-14 1981-11-14 シ−ト貼付方法

Publications (2)

Publication Number Publication Date
JPS5884440A JPS5884440A (ja) 1983-05-20
JPS6320381B2 true JPS6320381B2 (enExample) 1988-04-27

Family

ID=16123202

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56182717A Granted JPS5884440A (ja) 1981-11-14 1981-11-14 シ−ト貼付方法

Country Status (1)

Country Link
JP (1) JPS5884440A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0487187U (enExample) * 1990-11-30 1992-07-29

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0487187U (enExample) * 1990-11-30 1992-07-29

Also Published As

Publication number Publication date
JPS5884440A (ja) 1983-05-20

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