JPS5884440A - シ−ト貼付方法 - Google Patents
シ−ト貼付方法Info
- Publication number
- JPS5884440A JPS5884440A JP56182717A JP18271781A JPS5884440A JP S5884440 A JPS5884440 A JP S5884440A JP 56182717 A JP56182717 A JP 56182717A JP 18271781 A JP18271781 A JP 18271781A JP S5884440 A JPS5884440 A JP S5884440A
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- wafer
- stage
- workpiece
- punch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/04—Apparatus for manufacture or treatment
- H10P72/0441—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
Landscapes
- Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56182717A JPS5884440A (ja) | 1981-11-14 | 1981-11-14 | シ−ト貼付方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56182717A JPS5884440A (ja) | 1981-11-14 | 1981-11-14 | シ−ト貼付方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5884440A true JPS5884440A (ja) | 1983-05-20 |
| JPS6320381B2 JPS6320381B2 (enExample) | 1988-04-27 |
Family
ID=16123202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56182717A Granted JPS5884440A (ja) | 1981-11-14 | 1981-11-14 | シ−ト貼付方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5884440A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0487187U (enExample) * | 1990-11-30 | 1992-07-29 |
-
1981
- 1981-11-14 JP JP56182717A patent/JPS5884440A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6320381B2 (enExample) | 1988-04-27 |
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