JPS63192203A - 薄膜温度センサ - Google Patents

薄膜温度センサ

Info

Publication number
JPS63192203A
JPS63192203A JP2255887A JP2255887A JPS63192203A JP S63192203 A JPS63192203 A JP S63192203A JP 2255887 A JP2255887 A JP 2255887A JP 2255887 A JP2255887 A JP 2255887A JP S63192203 A JPS63192203 A JP S63192203A
Authority
JP
Japan
Prior art keywords
thin film
temperature sensor
film
film temperature
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2255887A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0381281B2 (enrdf_load_stackoverflow
Inventor
道井　敏
英一 真壁
健夫 山田
信善 竹内
直樹 原田
昌巳 原山
大高　晋一郎
憲司 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Engineering Corp
Unizon KK
Original Assignee
Unizon KK
NKK Corp
Nippon Kokan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unizon KK, NKK Corp, Nippon Kokan Ltd filed Critical Unizon KK
Priority to JP2255887A priority Critical patent/JPS63192203A/ja
Publication of JPS63192203A publication Critical patent/JPS63192203A/ja
Publication of JPH0381281B2 publication Critical patent/JPH0381281B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thermistors And Varistors (AREA)
JP2255887A 1987-02-04 1987-02-04 薄膜温度センサ Granted JPS63192203A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2255887A JPS63192203A (ja) 1987-02-04 1987-02-04 薄膜温度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2255887A JPS63192203A (ja) 1987-02-04 1987-02-04 薄膜温度センサ

Publications (2)

Publication Number Publication Date
JPS63192203A true JPS63192203A (ja) 1988-08-09
JPH0381281B2 JPH0381281B2 (enrdf_load_stackoverflow) 1991-12-27

Family

ID=12086186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2255887A Granted JPS63192203A (ja) 1987-02-04 1987-02-04 薄膜温度センサ

Country Status (1)

Country Link
JP (1) JPS63192203A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999046570A1 (fr) * 1998-03-12 1999-09-16 Yamatake Corporation Capteur et son procede de production
JP2006258520A (ja) * 2005-03-16 2006-09-28 Ishizuka Electronics Corp 電子体温計用プローブ
JP2012182258A (ja) * 2011-02-28 2012-09-20 Mitsubishi Materials Corp 温度センサ付き非接触給電装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1267107A (enrdf_load_stackoverflow) * 1969-11-25 1972-03-15
JPS55162903U (enrdf_load_stackoverflow) * 1979-05-09 1980-11-22

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1267107A (enrdf_load_stackoverflow) * 1969-11-25 1972-03-15
JPS55162903U (enrdf_load_stackoverflow) * 1979-05-09 1980-11-22

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999046570A1 (fr) * 1998-03-12 1999-09-16 Yamatake Corporation Capteur et son procede de production
US6382030B1 (en) 1998-03-12 2002-05-07 Yamatake Corporation Sensor and method of producing the same
JP2006258520A (ja) * 2005-03-16 2006-09-28 Ishizuka Electronics Corp 電子体温計用プローブ
JP2012182258A (ja) * 2011-02-28 2012-09-20 Mitsubishi Materials Corp 温度センサ付き非接触給電装置

Also Published As

Publication number Publication date
JPH0381281B2 (enrdf_load_stackoverflow) 1991-12-27

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