JPS63190788A - セラミツクスの金属化法 - Google Patents
セラミツクスの金属化法Info
- Publication number
- JPS63190788A JPS63190788A JP2205187A JP2205187A JPS63190788A JP S63190788 A JPS63190788 A JP S63190788A JP 2205187 A JP2205187 A JP 2205187A JP 2205187 A JP2205187 A JP 2205187A JP S63190788 A JPS63190788 A JP S63190788A
- Authority
- JP
- Japan
- Prior art keywords
- metal
- deposited
- ceramic
- ceramics
- metals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims description 61
- 238000000034 method Methods 0.000 title claims description 44
- 238000001465 metallisation Methods 0.000 title description 10
- 229910052751 metal Inorganic materials 0.000 claims description 86
- 239000002184 metal Substances 0.000 claims description 86
- 230000008018 melting Effects 0.000 claims description 22
- 238000002844 melting Methods 0.000 claims description 22
- 150000002739 metals Chemical class 0.000 claims description 21
- 238000007733 ion plating Methods 0.000 claims description 9
- 238000005240 physical vapour deposition Methods 0.000 claims description 7
- 239000002131 composite material Substances 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 5
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
- 150000001768 cations Chemical class 0.000 claims 1
- 239000010410 layer Substances 0.000 description 32
- 238000010438 heat treatment Methods 0.000 description 18
- 239000011888 foil Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 12
- 238000005219 brazing Methods 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 8
- 229910052759 nickel Inorganic materials 0.000 description 8
- 229910052719 titanium Inorganic materials 0.000 description 8
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000000945 filler Substances 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 229910052726 zirconium Inorganic materials 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 150000001247 metal acetylides Chemical class 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 229910017770 Cu—Ag Inorganic materials 0.000 description 1
- 241000252210 Cyprinidae Species 0.000 description 1
- 229910007948 ZrB2 Inorganic materials 0.000 description 1
- PCEXQRKSUSSDFT-UHFFFAOYSA-N [Mn].[Mo] Chemical compound [Mn].[Mo] PCEXQRKSUSSDFT-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- VWZIXVXBCBBRGP-UHFFFAOYSA-N boron;zirconium Chemical compound B#[Zr]#B VWZIXVXBCBBRGP-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000006023 eutectic alloy Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2205187A JPS63190788A (ja) | 1987-02-02 | 1987-02-02 | セラミツクスの金属化法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2205187A JPS63190788A (ja) | 1987-02-02 | 1987-02-02 | セラミツクスの金属化法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63190788A true JPS63190788A (ja) | 1988-08-08 |
| JPH059396B2 JPH059396B2 (enrdf_load_stackoverflow) | 1993-02-04 |
Family
ID=12072120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2205187A Granted JPS63190788A (ja) | 1987-02-02 | 1987-02-02 | セラミツクスの金属化法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63190788A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0632669A (ja) * | 1992-07-15 | 1994-02-08 | Toshiba Corp | 接合体、メタライズ体およびメタライズ体の製造方法 |
| JP2004051443A (ja) * | 2002-07-22 | 2004-02-19 | Ngk Insulators Ltd | 複合材料及びその製造方法 |
| KR20170049000A (ko) * | 2015-10-27 | 2017-05-10 | 주식회사 아모센스 | 세라믹 기판 제조 방법 및 이 제조방법으로 제조된 세라믹 기판 |
-
1987
- 1987-02-02 JP JP2205187A patent/JPS63190788A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0632669A (ja) * | 1992-07-15 | 1994-02-08 | Toshiba Corp | 接合体、メタライズ体およびメタライズ体の製造方法 |
| JP2004051443A (ja) * | 2002-07-22 | 2004-02-19 | Ngk Insulators Ltd | 複合材料及びその製造方法 |
| KR20170049000A (ko) * | 2015-10-27 | 2017-05-10 | 주식회사 아모센스 | 세라믹 기판 제조 방법 및 이 제조방법으로 제조된 세라믹 기판 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH059396B2 (enrdf_load_stackoverflow) | 1993-02-04 |
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