JPS63182528U - - Google Patents

Info

Publication number
JPS63182528U
JPS63182528U JP6284188U JP6284188U JPS63182528U JP S63182528 U JPS63182528 U JP S63182528U JP 6284188 U JP6284188 U JP 6284188U JP 6284188 U JP6284188 U JP 6284188U JP S63182528 U JPS63182528 U JP S63182528U
Authority
JP
Japan
Prior art keywords
sample
ion beam
oxygen ion
organic layer
exposing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6284188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6284188U priority Critical patent/JPS63182528U/ja
Publication of JPS63182528U publication Critical patent/JPS63182528U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP6284188U 1988-05-12 1988-05-12 Pending JPS63182528U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6284188U JPS63182528U (enrdf_load_stackoverflow) 1988-05-12 1988-05-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6284188U JPS63182528U (enrdf_load_stackoverflow) 1988-05-12 1988-05-12

Publications (1)

Publication Number Publication Date
JPS63182528U true JPS63182528U (enrdf_load_stackoverflow) 1988-11-24

Family

ID=30897508

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6284188U Pending JPS63182528U (enrdf_load_stackoverflow) 1988-05-12 1988-05-12

Country Status (1)

Country Link
JP (1) JPS63182528U (enrdf_load_stackoverflow)

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
APPL.PHYS.LETT=1979 *
THE BELL SYSTEM TECHNICAL JOURNAL=1979 *

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