JPS6185852U - - Google Patents

Info

Publication number
JPS6185852U
JPS6185852U JP1984171789U JP17178984U JPS6185852U JP S6185852 U JPS6185852 U JP S6185852U JP 1984171789 U JP1984171789 U JP 1984171789U JP 17178984 U JP17178984 U JP 17178984U JP S6185852 U JPS6185852 U JP S6185852U
Authority
JP
Japan
Prior art keywords
charged particle
repair device
particle irradiation
mask
mask repair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984171789U
Other languages
English (en)
Japanese (ja)
Other versions
JPS638901Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984171789U priority Critical patent/JPS638901Y2/ja
Priority to EP85903053A priority patent/EP0221184B1/en
Priority to PCT/JP1985/000349 priority patent/WO1986000426A1/ja
Priority to DE8585903053T priority patent/DE3579236D1/de
Publication of JPS6185852U publication Critical patent/JPS6185852U/ja
Application granted granted Critical
Publication of JPS638901Y2 publication Critical patent/JPS638901Y2/ja
Priority to US07/227,469 priority patent/US4930439A/en
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1984171789U 1984-06-26 1984-11-13 Expired JPS638901Y2 (enrdf_load_stackoverflow)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP1984171789U JPS638901Y2 (enrdf_load_stackoverflow) 1984-11-13 1984-11-13
EP85903053A EP0221184B1 (en) 1984-06-26 1985-06-21 Mask repairing apparatus
PCT/JP1985/000349 WO1986000426A1 (en) 1984-06-26 1985-06-21 Mask repairing apparatus
DE8585903053T DE3579236D1 (de) 1984-06-26 1985-06-21 Reparatur von masken.
US07/227,469 US4930439A (en) 1984-06-26 1988-08-02 Mask-repairing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984171789U JPS638901Y2 (enrdf_load_stackoverflow) 1984-11-13 1984-11-13

Publications (2)

Publication Number Publication Date
JPS6185852U true JPS6185852U (enrdf_load_stackoverflow) 1986-06-05
JPS638901Y2 JPS638901Y2 (enrdf_load_stackoverflow) 1988-03-16

Family

ID=30729469

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984171789U Expired JPS638901Y2 (enrdf_load_stackoverflow) 1984-06-26 1984-11-13

Country Status (1)

Country Link
JP (1) JPS638901Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS638901Y2 (enrdf_load_stackoverflow) 1988-03-16

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