JPS62160455U - - Google Patents

Info

Publication number
JPS62160455U
JPS62160455U JP4884586U JP4884586U JPS62160455U JP S62160455 U JPS62160455 U JP S62160455U JP 4884586 U JP4884586 U JP 4884586U JP 4884586 U JP4884586 U JP 4884586U JP S62160455 U JPS62160455 U JP S62160455U
Authority
JP
Japan
Prior art keywords
sample
sample chamber
gate valve
charged particle
particle beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4884586U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0548357Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4884586U priority Critical patent/JPH0548357Y2/ja
Publication of JPS62160455U publication Critical patent/JPS62160455U/ja
Application granted granted Critical
Publication of JPH0548357Y2 publication Critical patent/JPH0548357Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP4884586U 1986-03-31 1986-03-31 Expired - Lifetime JPH0548357Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4884586U JPH0548357Y2 (enrdf_load_stackoverflow) 1986-03-31 1986-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4884586U JPH0548357Y2 (enrdf_load_stackoverflow) 1986-03-31 1986-03-31

Publications (2)

Publication Number Publication Date
JPS62160455U true JPS62160455U (enrdf_load_stackoverflow) 1987-10-12
JPH0548357Y2 JPH0548357Y2 (enrdf_load_stackoverflow) 1993-12-24

Family

ID=30870757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4884586U Expired - Lifetime JPH0548357Y2 (enrdf_load_stackoverflow) 1986-03-31 1986-03-31

Country Status (1)

Country Link
JP (1) JPH0548357Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006123437A1 (ja) * 2005-05-20 2006-11-23 Advantest Corporation 荷電粒子ビーム装置、コンタミネ－ションの除去方法及び試料の観察方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006123437A1 (ja) * 2005-05-20 2006-11-23 Advantest Corporation 荷電粒子ビーム装置、コンタミネ－ションの除去方法及び試料の観察方法
JPWO2006123437A1 (ja) * 2005-05-20 2008-12-25 株式会社アドバンテスト 荷電粒子ビーム装置、コンタミネーションの除去方法及び試料の観察方法
JP4580982B2 (ja) * 2005-05-20 2010-11-17 株式会社アドバンテスト 荷電粒子ビーム装置、コンタミネーションの除去方法及び試料の観察方法

Also Published As

Publication number Publication date
JPH0548357Y2 (enrdf_load_stackoverflow) 1993-12-24

Similar Documents

Publication Publication Date Title
JPS62160455U (enrdf_load_stackoverflow)
JPS6399752U (enrdf_load_stackoverflow)
JPS61162931U (enrdf_load_stackoverflow)
JPH0333085U (enrdf_load_stackoverflow)
JPH0365109U (enrdf_load_stackoverflow)
JPH0345505U (enrdf_load_stackoverflow)
JPH02129660U (enrdf_load_stackoverflow)
JPS62161216U (enrdf_load_stackoverflow)
JPS62196345U (enrdf_load_stackoverflow)
JPS6328887U (enrdf_load_stackoverflow)
JPH0176029U (enrdf_load_stackoverflow)
JPH0241427U (enrdf_load_stackoverflow)
JPH01165560U (enrdf_load_stackoverflow)
JPH02104632U (enrdf_load_stackoverflow)
JPH0170259U (enrdf_load_stackoverflow)
JPH02105170U (enrdf_load_stackoverflow)
JPS63134449U (enrdf_load_stackoverflow)
JPH02103639U (enrdf_load_stackoverflow)
JPH0239448U (enrdf_load_stackoverflow)
JPS62137549U (enrdf_load_stackoverflow)
JPS6387759U (enrdf_load_stackoverflow)
JPH0464759U (enrdf_load_stackoverflow)
JPH0337744U (enrdf_load_stackoverflow)
JPS6358455U (enrdf_load_stackoverflow)
JPH0211159U (enrdf_load_stackoverflow)