JPS6358455U - - Google Patents

Info

Publication number
JPS6358455U
JPS6358455U JP15269886U JP15269886U JPS6358455U JP S6358455 U JPS6358455 U JP S6358455U JP 15269886 U JP15269886 U JP 15269886U JP 15269886 U JP15269886 U JP 15269886U JP S6358455 U JPS6358455 U JP S6358455U
Authority
JP
Japan
Prior art keywords
wafer
disk
elevator
target chamber
dummy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15269886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15269886U priority Critical patent/JPS6358455U/ja
Publication of JPS6358455U publication Critical patent/JPS6358455U/ja
Pending legal-status Critical Current

Links

JP15269886U 1986-10-03 1986-10-03 Pending JPS6358455U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15269886U JPS6358455U (enrdf_load_stackoverflow) 1986-10-03 1986-10-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15269886U JPS6358455U (enrdf_load_stackoverflow) 1986-10-03 1986-10-03

Publications (1)

Publication Number Publication Date
JPS6358455U true JPS6358455U (enrdf_load_stackoverflow) 1988-04-19

Family

ID=31070910

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15269886U Pending JPS6358455U (enrdf_load_stackoverflow) 1986-10-03 1986-10-03

Country Status (1)

Country Link
JP (1) JPS6358455U (enrdf_load_stackoverflow)

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