JPS63177065U - - Google Patents
Info
- Publication number
- JPS63177065U JPS63177065U JP6873087U JP6873087U JPS63177065U JP S63177065 U JPS63177065 U JP S63177065U JP 6873087 U JP6873087 U JP 6873087U JP 6873087 U JP6873087 U JP 6873087U JP S63177065 U JPS63177065 U JP S63177065U
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- electrode
- hole
- conductive
- semiconductor integrated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000004020 conductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Description
第1図は本考案の一実施例の断面図、第2図は
本考案の他の実施例の断面図、第3図は従来の半
導体集積回路の断面図である。
1,10,11……集積回路チツプ、2……チ
ツプ上面電極、3,3a,3b,3c……絶縁層
、4,14……動作層、5,15……スルーホー
ル、6,16……裏面接地電極、7……ボンデイ
ングワイヤ、8……基板導体層。
FIG. 1 is a cross-sectional view of one embodiment of the present invention, FIG. 2 is a cross-sectional view of another embodiment of the present invention, and FIG. 3 is a cross-sectional view of a conventional semiconductor integrated circuit. 1, 10, 11... Integrated circuit chip, 2... Chip upper surface electrode, 3, 3a, 3b, 3c... Insulating layer, 4, 14... Operating layer, 5, 15... Through hole, 6, 16... . . . Back ground electrode, 7 . . . Bonding wire, 8 . . . Substrate conductor layer.
Claims (1)
と導電スルーホールを用いて接続していることを
特徴とする半導体集積回路。 A semiconductor integrated circuit characterized in that an electrode on the front surface of an integrated circuit chip is connected to an electrode on the back surface using a conductive through hole.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6873087U JPS63177065U (en) | 1987-05-08 | 1987-05-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6873087U JPS63177065U (en) | 1987-05-08 | 1987-05-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63177065U true JPS63177065U (en) | 1988-11-16 |
Family
ID=30908815
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6873087U Pending JPS63177065U (en) | 1987-05-08 | 1987-05-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63177065U (en) |
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1987
- 1987-05-08 JP JP6873087U patent/JPS63177065U/ja active Pending