JPS6317518A - サセプタ加熱方法 - Google Patents

サセプタ加熱方法

Info

Publication number
JPS6317518A
JPS6317518A JP61160933A JP16093386A JPS6317518A JP S6317518 A JPS6317518 A JP S6317518A JP 61160933 A JP61160933 A JP 61160933A JP 16093386 A JP16093386 A JP 16093386A JP S6317518 A JPS6317518 A JP S6317518A
Authority
JP
Japan
Prior art keywords
susceptor
heating
temperature
output
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61160933A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0554693B2 (enExample
Inventor
Nobuo Kashiwagi
伸夫 柏木
Yoshihiro Miyanomae
宮之前　芳洋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP61160933A priority Critical patent/JPS6317518A/ja
Publication of JPS6317518A publication Critical patent/JPS6317518A/ja
Publication of JPH0554693B2 publication Critical patent/JPH0554693B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Recrystallisation Techniques (AREA)
JP61160933A 1986-07-10 1986-07-10 サセプタ加熱方法 Granted JPS6317518A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61160933A JPS6317518A (ja) 1986-07-10 1986-07-10 サセプタ加熱方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61160933A JPS6317518A (ja) 1986-07-10 1986-07-10 サセプタ加熱方法

Publications (2)

Publication Number Publication Date
JPS6317518A true JPS6317518A (ja) 1988-01-25
JPH0554693B2 JPH0554693B2 (enExample) 1993-08-13

Family

ID=15725380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61160933A Granted JPS6317518A (ja) 1986-07-10 1986-07-10 サセプタ加熱方法

Country Status (1)

Country Link
JP (1) JPS6317518A (enExample)

Also Published As

Publication number Publication date
JPH0554693B2 (enExample) 1993-08-13

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