JPS63171954U - - Google Patents

Info

Publication number
JPS63171954U
JPS63171954U JP6258887U JP6258887U JPS63171954U JP S63171954 U JPS63171954 U JP S63171954U JP 6258887 U JP6258887 U JP 6258887U JP 6258887 U JP6258887 U JP 6258887U JP S63171954 U JPS63171954 U JP S63171954U
Authority
JP
Japan
Prior art keywords
microwave
plasma
ion
insulator
extraction electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6258887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6258887U priority Critical patent/JPS63171954U/ja
Publication of JPS63171954U publication Critical patent/JPS63171954U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP6258887U 1987-04-27 1987-04-27 Pending JPS63171954U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6258887U JPS63171954U (OSRAM) 1987-04-27 1987-04-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6258887U JPS63171954U (OSRAM) 1987-04-27 1987-04-27

Publications (1)

Publication Number Publication Date
JPS63171954U true JPS63171954U (OSRAM) 1988-11-09

Family

ID=30897004

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6258887U Pending JPS63171954U (OSRAM) 1987-04-27 1987-04-27

Country Status (1)

Country Link
JP (1) JPS63171954U (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10149789A (ja) * 1996-11-18 1998-06-02 Nissin Electric Co Ltd イオン源装置
JP2016207480A (ja) * 2015-04-23 2016-12-08 日新電機株式会社 荷電粒子源
JP2017091826A (ja) * 2015-11-11 2017-05-25 日新イオン機器株式会社 絶縁スペーサ、電極体、荷電粒子源および荷電粒子ビーム照射装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60195855A (ja) * 1984-03-19 1985-10-04 Hitachi Ltd 大容量イオン源

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60195855A (ja) * 1984-03-19 1985-10-04 Hitachi Ltd 大容量イオン源

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10149789A (ja) * 1996-11-18 1998-06-02 Nissin Electric Co Ltd イオン源装置
JP2016207480A (ja) * 2015-04-23 2016-12-08 日新電機株式会社 荷電粒子源
JP2017091826A (ja) * 2015-11-11 2017-05-25 日新イオン機器株式会社 絶縁スペーサ、電極体、荷電粒子源および荷電粒子ビーム照射装置

Similar Documents

Publication Publication Date Title
JPS6280950A (ja) イオン源
JPS62229641A (ja) 電子サイクロトロン共振イオン源
JPS63171954U (OSRAM)
JPH08102278A (ja) イオンビーム発生装置及び方法
JPS6293834A (ja) イオン源
JP2567892B2 (ja) プラズマ処理装置
JPS63119198A (ja) プラズマ発生装置
JP2709162B2 (ja) マイクロ波プラズマ処理装置
GB849565A (en) Ion source using a high frequency field
JPS5836455B2 (ja) タンザクビ−ムヨウマイクロハイオンゲン
JPS594819B2 (ja) イオン源
JP3529445B2 (ja) マイクロ波イオン源
JPS60243957A (ja) マイクロ波イオン源
JP2580943Y2 (ja) イオン源
JPH01128335A (ja) 電子サイクロトロン共鳴型イオン源
JPS59121747A (ja) イオンミリング方法
JPS636725A (ja) ジヤイロトロン
JPH0284249U (OSRAM)
JPH0650109B2 (ja) Ｒｆ型イオン源
JPS617542A (ja) マイクロ波イオン源
JPH0567444A (ja) リニアイオン源
JPH03201703A (ja) プラズマ発生用マイクロ波アンテナ
JPH06139978A (ja) パルス駆動型の電子サイクロトロン共振イオン源
JPH0644007Y2 (ja) イオン処理装置
JPH0693346B2 (ja) プラズマ発生装置