JPS63162862U - - Google Patents

Info

Publication number
JPS63162862U
JPS63162862U JP3500388U JP3500388U JPS63162862U JP S63162862 U JPS63162862 U JP S63162862U JP 3500388 U JP3500388 U JP 3500388U JP 3500388 U JP3500388 U JP 3500388U JP S63162862 U JPS63162862 U JP S63162862U
Authority
JP
Japan
Prior art keywords
substrate
carrier
vacuum
chemical reaction
carriers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3500388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3500388U priority Critical patent/JPS63162862U/ja
Publication of JPS63162862U publication Critical patent/JPS63162862U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP3500388U 1988-03-16 1988-03-16 Pending JPS63162862U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3500388U JPS63162862U (enrdf_load_stackoverflow) 1988-03-16 1988-03-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3500388U JPS63162862U (enrdf_load_stackoverflow) 1988-03-16 1988-03-16

Publications (1)

Publication Number Publication Date
JPS63162862U true JPS63162862U (enrdf_load_stackoverflow) 1988-10-24

Family

ID=30844091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3500388U Pending JPS63162862U (enrdf_load_stackoverflow) 1988-03-16 1988-03-16

Country Status (1)

Country Link
JP (1) JPS63162862U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5016476A (enrdf_load_stackoverflow) * 1973-04-27 1975-02-21

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5016476A (enrdf_load_stackoverflow) * 1973-04-27 1975-02-21

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