JPS6315768Y2 - - Google Patents
Info
- Publication number
- JPS6315768Y2 JPS6315768Y2 JP6135282U JP6135282U JPS6315768Y2 JP S6315768 Y2 JPS6315768 Y2 JP S6315768Y2 JP 6135282 U JP6135282 U JP 6135282U JP 6135282 U JP6135282 U JP 6135282U JP S6315768 Y2 JPS6315768 Y2 JP S6315768Y2
- Authority
- JP
- Japan
- Prior art keywords
- collimator
- hole
- shutter
- mounting hole
- guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000009751 slip forming Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6135282U JPS58163809U (ja) | 1982-04-27 | 1982-04-27 | Ｘ線微小部膜厚計におけるコリメ−タ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6135282U JPS58163809U (ja) | 1982-04-27 | 1982-04-27 | Ｘ線微小部膜厚計におけるコリメ−タ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58163809U JPS58163809U (ja) | 1983-10-31 |
| JPS6315768Y2 true JPS6315768Y2 (cs) | 1988-05-06 |
Family
ID=30071555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6135282U Granted JPS58163809U (ja) | 1982-04-27 | 1982-04-27 | Ｘ線微小部膜厚計におけるコリメ−タ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58163809U (cs) |
-
1982
- 1982-04-27 JP JP6135282U patent/JPS58163809U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58163809U (ja) | 1983-10-31 |
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