JPS63152138A - ダスト管理装置 - Google Patents

ダスト管理装置

Info

Publication number
JPS63152138A
JPS63152138A JP29866886A JP29866886A JPS63152138A JP S63152138 A JPS63152138 A JP S63152138A JP 29866886 A JP29866886 A JP 29866886A JP 29866886 A JP29866886 A JP 29866886A JP S63152138 A JPS63152138 A JP S63152138A
Authority
JP
Japan
Prior art keywords
dust
value
comparison
tolerance
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP29866886A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0428143B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Nishioka
西岡　博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP29866886A priority Critical patent/JPS63152138A/ja
Publication of JPS63152138A publication Critical patent/JPS63152138A/ja
Publication of JPH0428143B2 publication Critical patent/JPH0428143B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP29866886A 1986-12-17 1986-12-17 ダスト管理装置 Granted JPS63152138A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29866886A JPS63152138A (ja) 1986-12-17 1986-12-17 ダスト管理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29866886A JPS63152138A (ja) 1986-12-17 1986-12-17 ダスト管理装置

Publications (2)

Publication Number Publication Date
JPS63152138A true JPS63152138A (ja) 1988-06-24
JPH0428143B2 JPH0428143B2 (enrdf_load_stackoverflow) 1992-05-13

Family

ID=17862721

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29866886A Granted JPS63152138A (ja) 1986-12-17 1986-12-17 ダスト管理装置

Country Status (1)

Country Link
JP (1) JPS63152138A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0428143B2 (enrdf_load_stackoverflow) 1992-05-13

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees