JPS63151086A - ガリウム燐緑色発光ダイオ−ドの製造方法 - Google Patents
ガリウム燐緑色発光ダイオ−ドの製造方法Info
- Publication number
- JPS63151086A JPS63151086A JP61299138A JP29913886A JPS63151086A JP S63151086 A JPS63151086 A JP S63151086A JP 61299138 A JP61299138 A JP 61299138A JP 29913886 A JP29913886 A JP 29913886A JP S63151086 A JPS63151086 A JP S63151086A
- Authority
- JP
- Japan
- Prior art keywords
- solution
- layer
- gap
- temperature
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 229910005540 GaP Inorganic materials 0.000 title description 72
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 title description 2
- 238000000034 method Methods 0.000 claims abstract description 50
- 239000000758 substrate Substances 0.000 claims abstract description 36
- 239000007791 liquid phase Substances 0.000 claims description 22
- 230000007423 decrease Effects 0.000 claims description 5
- 229910052733 gallium Inorganic materials 0.000 claims description 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 3
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 claims description 3
- 239000013078 crystal Substances 0.000 abstract description 49
- 239000007789 gas Substances 0.000 abstract description 9
- 239000007788 liquid Substances 0.000 abstract description 5
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 abstract description 3
- 229910000037 hydrogen sulfide Inorganic materials 0.000 abstract description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract description 2
- 238000001816 cooling Methods 0.000 abstract 3
- 239000010410 layer Substances 0.000 description 95
- 238000010583 slow cooling Methods 0.000 description 23
- 230000000694 effects Effects 0.000 description 14
- 238000010586 diagram Methods 0.000 description 12
- 239000012535 impurity Substances 0.000 description 12
- 238000009826 distribution Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 239000011701 zinc Substances 0.000 description 5
- 230000007547 defect Effects 0.000 description 4
- 229920006395 saturated elastomer Polymers 0.000 description 4
- 238000000137 annealing Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- MDPILPRLPQYEEN-UHFFFAOYSA-N aluminium arsenide Chemical compound [As]#[Al] MDPILPRLPQYEEN-UHFFFAOYSA-N 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- LEYJJTBJCFGAQN-UHFFFAOYSA-N chembl1985378 Chemical compound OC1=CC=C2C=CC=CC2=C1N=NC(C=C1)=CC=C1N=NC1=CC=C(S(O)(=O)=O)C=C1 LEYJJTBJCFGAQN-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000013065 commercial product Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Landscapes
- Led Devices (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61299138A JPS63151086A (ja) | 1986-12-16 | 1986-12-16 | ガリウム燐緑色発光ダイオ−ドの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61299138A JPS63151086A (ja) | 1986-12-16 | 1986-12-16 | ガリウム燐緑色発光ダイオ−ドの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63151086A true JPS63151086A (ja) | 1988-06-23 |
| JPH0525396B2 JPH0525396B2 (enrdf_load_stackoverflow) | 1993-04-12 |
Family
ID=17868610
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61299138A Granted JPS63151086A (ja) | 1986-12-16 | 1986-12-16 | ガリウム燐緑色発光ダイオ−ドの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63151086A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5032539A (en) * | 1988-07-08 | 1991-07-16 | Kabushiki Kaisha Toshiba | Method of manufacturing green light emitting diode |
-
1986
- 1986-12-16 JP JP61299138A patent/JPS63151086A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5032539A (en) * | 1988-07-08 | 1991-07-16 | Kabushiki Kaisha Toshiba | Method of manufacturing green light emitting diode |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0525396B2 (enrdf_load_stackoverflow) | 1993-04-12 |
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