JPS63151016A - 横型気相成長装置 - Google Patents

横型気相成長装置

Info

Publication number
JPS63151016A
JPS63151016A JP29760186A JP29760186A JPS63151016A JP S63151016 A JPS63151016 A JP S63151016A JP 29760186 A JP29760186 A JP 29760186A JP 29760186 A JP29760186 A JP 29760186A JP S63151016 A JPS63151016 A JP S63151016A
Authority
JP
Japan
Prior art keywords
gas
susceptor
main body
fork
furnace main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP29760186A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0556854B2 (enExample
Inventor
Shozo Yuge
省三 弓削
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP29760186A priority Critical patent/JPS63151016A/ja
Publication of JPS63151016A publication Critical patent/JPS63151016A/ja
Publication of JPH0556854B2 publication Critical patent/JPH0556854B2/ja
Granted legal-status Critical Current

Links

JP29760186A 1986-12-16 1986-12-16 横型気相成長装置 Granted JPS63151016A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29760186A JPS63151016A (ja) 1986-12-16 1986-12-16 横型気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29760186A JPS63151016A (ja) 1986-12-16 1986-12-16 横型気相成長装置

Publications (2)

Publication Number Publication Date
JPS63151016A true JPS63151016A (ja) 1988-06-23
JPH0556854B2 JPH0556854B2 (enExample) 1993-08-20

Family

ID=17848671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29760186A Granted JPS63151016A (ja) 1986-12-16 1986-12-16 横型気相成長装置

Country Status (1)

Country Link
JP (1) JPS63151016A (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60193323A (ja) * 1984-03-15 1985-10-01 Nec Corp 半導体気相成長装置
JPS6266622A (ja) * 1985-09-19 1987-03-26 Matsushita Electric Ind Co Ltd 気相成長装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60193323A (ja) * 1984-03-15 1985-10-01 Nec Corp 半導体気相成長装置
JPS6266622A (ja) * 1985-09-19 1987-03-26 Matsushita Electric Ind Co Ltd 気相成長装置

Also Published As

Publication number Publication date
JPH0556854B2 (enExample) 1993-08-20

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees