JPH0556854B2 - - Google Patents

Info

Publication number
JPH0556854B2
JPH0556854B2 JP61297601A JP29760186A JPH0556854B2 JP H0556854 B2 JPH0556854 B2 JP H0556854B2 JP 61297601 A JP61297601 A JP 61297601A JP 29760186 A JP29760186 A JP 29760186A JP H0556854 B2 JPH0556854 B2 JP H0556854B2
Authority
JP
Japan
Prior art keywords
furnace body
susceptor
gas
inlet
fork
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61297601A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63151016A (ja
Inventor
Shozo Yuge
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP29760186A priority Critical patent/JPS63151016A/ja
Publication of JPS63151016A publication Critical patent/JPS63151016A/ja
Publication of JPH0556854B2 publication Critical patent/JPH0556854B2/ja
Granted legal-status Critical Current

Links

JP29760186A 1986-12-16 1986-12-16 横型気相成長装置 Granted JPS63151016A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29760186A JPS63151016A (ja) 1986-12-16 1986-12-16 横型気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29760186A JPS63151016A (ja) 1986-12-16 1986-12-16 横型気相成長装置

Publications (2)

Publication Number Publication Date
JPS63151016A JPS63151016A (ja) 1988-06-23
JPH0556854B2 true JPH0556854B2 (enExample) 1993-08-20

Family

ID=17848671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29760186A Granted JPS63151016A (ja) 1986-12-16 1986-12-16 横型気相成長装置

Country Status (1)

Country Link
JP (1) JPS63151016A (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60193323A (ja) * 1984-03-15 1985-10-01 Nec Corp 半導体気相成長装置
JPS6266622A (ja) * 1985-09-19 1987-03-26 Matsushita Electric Ind Co Ltd 気相成長装置

Also Published As

Publication number Publication date
JPS63151016A (ja) 1988-06-23

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees