JPS63145776A - 被膜作成方法 - Google Patents
被膜作成方法Info
- Publication number
- JPS63145776A JPS63145776A JP22938587A JP22938587A JPS63145776A JP S63145776 A JPS63145776 A JP S63145776A JP 22938587 A JP22938587 A JP 22938587A JP 22938587 A JP22938587 A JP 22938587A JP S63145776 A JPS63145776 A JP S63145776A
- Authority
- JP
- Japan
- Prior art keywords
- carbon
- film
- substrate
- gas
- amorphous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052799 carbon Inorganic materials 0.000 title claims abstract description 37
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims description 34
- 230000015572 biosynthetic process Effects 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 11
- 239000012535 impurity Substances 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 17
- 239000012808 vapor phase Substances 0.000 claims description 13
- 239000010703 silicon Substances 0.000 claims description 9
- 238000000576 coating method Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 15
- 239000000463 material Substances 0.000 abstract description 12
- 238000010438 heat treatment Methods 0.000 abstract description 7
- 239000004215 Carbon black (E152) Substances 0.000 abstract description 4
- 229910052796 boron Inorganic materials 0.000 abstract description 4
- 229930195733 hydrocarbon Natural products 0.000 abstract description 4
- 229910052698 phosphorus Inorganic materials 0.000 abstract description 4
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 abstract description 3
- 238000006243 chemical reaction Methods 0.000 abstract description 3
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 abstract description 3
- 239000011521 glass Substances 0.000 abstract description 3
- 150000002430 hydrocarbons Chemical class 0.000 abstract description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 abstract description 3
- CZDYPVPMEAXLPK-UHFFFAOYSA-N tetramethylsilane Chemical compound C[Si](C)(C)C CZDYPVPMEAXLPK-UHFFFAOYSA-N 0.000 abstract description 3
- 239000000919 ceramic Substances 0.000 abstract description 2
- VCZQFJFZMMALHB-UHFFFAOYSA-N tetraethylsilane Chemical compound CC[Si](CC)(CC)CC VCZQFJFZMMALHB-UHFFFAOYSA-N 0.000 abstract description 2
- 230000003213 activating effect Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- -1 composed of carbon Chemical compound 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 206010037660 Pyrexia Diseases 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 241001156002 Anthonomus pomorum Species 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22938587A JPS63145776A (ja) | 1987-09-12 | 1987-09-12 | 被膜作成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22938587A JPS63145776A (ja) | 1987-09-12 | 1987-09-12 | 被膜作成方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56140653A Division JPS5842472A (ja) | 1981-09-07 | 1981-09-07 | サ−マルヘツド |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63145776A true JPS63145776A (ja) | 1988-06-17 |
| JPH0372711B2 JPH0372711B2 (enrdf_load_stackoverflow) | 1991-11-19 |
Family
ID=16891358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22938587A Granted JPS63145776A (ja) | 1987-09-12 | 1987-09-12 | 被膜作成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63145776A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0649645A (ja) * | 1992-07-31 | 1994-02-22 | Yoshida Kogyo Kk <Ykk> | 硬質多層膜形成体およびその製造方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6475836B1 (en) | 1999-03-29 | 2002-11-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4943078A (enrdf_load_stackoverflow) * | 1972-08-30 | 1974-04-23 | ||
| JPS5328576A (en) * | 1976-08-13 | 1978-03-16 | Nat Res Dev | Surface coating process with cargonaceous material and apparatus therefor |
| JPS566920A (en) * | 1979-06-28 | 1981-01-24 | Philips Nv | Dry lubricating bearing |
| JPS57111220A (en) * | 1980-08-21 | 1982-07-10 | Nat Res Dev | Carbon layer coating method |
| JPS6153955A (ja) * | 1984-08-24 | 1986-03-18 | 松下電工株式会社 | エア−コレクタの取付構造 |
-
1987
- 1987-09-12 JP JP22938587A patent/JPS63145776A/ja active Granted
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4943078A (enrdf_load_stackoverflow) * | 1972-08-30 | 1974-04-23 | ||
| JPS5328576A (en) * | 1976-08-13 | 1978-03-16 | Nat Res Dev | Surface coating process with cargonaceous material and apparatus therefor |
| JPS566920A (en) * | 1979-06-28 | 1981-01-24 | Philips Nv | Dry lubricating bearing |
| JPS57111220A (en) * | 1980-08-21 | 1982-07-10 | Nat Res Dev | Carbon layer coating method |
| JPS6153955A (ja) * | 1984-08-24 | 1986-03-18 | 松下電工株式会社 | エア−コレクタの取付構造 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0649645A (ja) * | 1992-07-31 | 1994-02-22 | Yoshida Kogyo Kk <Ykk> | 硬質多層膜形成体およびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0372711B2 (enrdf_load_stackoverflow) | 1991-11-19 |
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