JPS63141689A - 板状体の回転機構を有する昇降方法及びその装置 - Google Patents

板状体の回転機構を有する昇降方法及びその装置

Info

Publication number
JPS63141689A
JPS63141689A JP28676686A JP28676686A JPS63141689A JP S63141689 A JPS63141689 A JP S63141689A JP 28676686 A JP28676686 A JP 28676686A JP 28676686 A JP28676686 A JP 28676686A JP S63141689 A JPS63141689 A JP S63141689A
Authority
JP
Japan
Prior art keywords
plate
holding mechanism
cleaning
degrees
shaped body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28676686A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0439394B2 (enExample
Inventor
工藤　人志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Florm Kk
FUROOMU KK
Original Assignee
Florm Kk
FUROOMU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Florm Kk, FUROOMU KK filed Critical Florm Kk
Priority to JP28676686A priority Critical patent/JPS63141689A/ja
Publication of JPS63141689A publication Critical patent/JPS63141689A/ja
Publication of JPH0439394B2 publication Critical patent/JPH0439394B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP28676686A 1986-12-03 1986-12-03 板状体の回転機構を有する昇降方法及びその装置 Granted JPS63141689A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28676686A JPS63141689A (ja) 1986-12-03 1986-12-03 板状体の回転機構を有する昇降方法及びその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28676686A JPS63141689A (ja) 1986-12-03 1986-12-03 板状体の回転機構を有する昇降方法及びその装置

Publications (2)

Publication Number Publication Date
JPS63141689A true JPS63141689A (ja) 1988-06-14
JPH0439394B2 JPH0439394B2 (enExample) 1992-06-29

Family

ID=17708768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28676686A Granted JPS63141689A (ja) 1986-12-03 1986-12-03 板状体の回転機構を有する昇降方法及びその装置

Country Status (1)

Country Link
JP (1) JPS63141689A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02219228A (ja) * 1989-02-20 1990-08-31 Tsurumi Kogyo Kk 洗浄装置
JPH0547728A (ja) * 1991-08-13 1993-02-26 Shin Etsu Handotai Co Ltd ウエーハ起立方法及び装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02219228A (ja) * 1989-02-20 1990-08-31 Tsurumi Kogyo Kk 洗浄装置
JPH0547728A (ja) * 1991-08-13 1993-02-26 Shin Etsu Handotai Co Ltd ウエーハ起立方法及び装置

Also Published As

Publication number Publication date
JPH0439394B2 (enExample) 1992-06-29

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