JPS63140624U - - Google Patents
Info
- Publication number
- JPS63140624U JPS63140624U JP3394087U JP3394087U JPS63140624U JP S63140624 U JPS63140624 U JP S63140624U JP 3394087 U JP3394087 U JP 3394087U JP 3394087 U JP3394087 U JP 3394087U JP S63140624 U JPS63140624 U JP S63140624U
- Authority
- JP
- Japan
- Prior art keywords
- ozone
- ozone generator
- substrate
- electrode
- metal oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 5
- 239000003054 catalyst Substances 0.000 claims description 2
- 229910044991 metal oxide Inorganic materials 0.000 claims description 2
- 150000004706 metal oxides Chemical class 0.000 claims description 2
- 229920000620 organic polymer Polymers 0.000 claims 1
- 239000012528 membrane Substances 0.000 description 1
- 239000005518 polymer electrolyte Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3394087U JPS63140624U ( ) | 1987-03-09 | 1987-03-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3394087U JPS63140624U ( ) | 1987-03-09 | 1987-03-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63140624U true JPS63140624U ( ) | 1988-09-16 |
Family
ID=30842017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3394087U Pending JPS63140624U ( ) | 1987-03-09 | 1987-03-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63140624U ( ) |
-
1987
- 1987-03-09 JP JP3394087U patent/JPS63140624U/ja active Pending
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