JPS63139632A - 真空吸着装置 - Google Patents

真空吸着装置

Info

Publication number
JPS63139632A
JPS63139632A JP61281814A JP28181486A JPS63139632A JP S63139632 A JPS63139632 A JP S63139632A JP 61281814 A JP61281814 A JP 61281814A JP 28181486 A JP28181486 A JP 28181486A JP S63139632 A JPS63139632 A JP S63139632A
Authority
JP
Japan
Prior art keywords
suction
vacuum suction
inner opening
positive pressure
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61281814A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0575539B2 (enrdf_load_stackoverflow
Inventor
Akihito Hirata
平田　明仁
Yasumasa Nishimura
西村　安正
Tadahiro Fuse
布施　忠宏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi High Tech Corp
Original Assignee
Hitachi Ltd
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Ltd
Priority to JP61281814A priority Critical patent/JPS63139632A/ja
Publication of JPS63139632A publication Critical patent/JPS63139632A/ja
Publication of JPH0575539B2 publication Critical patent/JPH0575539B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
JP61281814A 1986-11-28 1986-11-28 真空吸着装置 Granted JPS63139632A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61281814A JPS63139632A (ja) 1986-11-28 1986-11-28 真空吸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61281814A JPS63139632A (ja) 1986-11-28 1986-11-28 真空吸着装置

Publications (2)

Publication Number Publication Date
JPS63139632A true JPS63139632A (ja) 1988-06-11
JPH0575539B2 JPH0575539B2 (enrdf_load_stackoverflow) 1993-10-20

Family

ID=17644364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61281814A Granted JPS63139632A (ja) 1986-11-28 1986-11-28 真空吸着装置

Country Status (1)

Country Link
JP (1) JPS63139632A (enrdf_load_stackoverflow)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0839377A (ja) * 1994-07-29 1996-02-13 Ckd Corp 真空チャック装置からのワークの取り外し方法及びワークの取り外し装置
JPH10277772A (ja) * 1997-04-02 1998-10-20 Sharp Corp 基板ビーム加工装置
JP2006036471A (ja) * 2004-07-28 2006-02-09 Shinko Electric Co Ltd 基板の受渡し方法、及びその装置
JP2008041761A (ja) * 2006-08-02 2008-02-21 Sekisui Chem Co Ltd 被処理物の処理後剥離方法及び設置装置
JP2010177607A (ja) * 2009-02-02 2010-08-12 Ushio Inc ワークステージ及び該ワークステージを使用した露光装置
JP2011042130A (ja) * 2009-08-21 2011-03-03 Konica Minolta Ij Technologies Inc インクジェットヘッドの製造方法
JP2011093081A (ja) * 2009-10-30 2011-05-12 Sun Yueh Way 吸着装置
CN102569147A (zh) * 2010-12-28 2012-07-11 上海微电子装备有限公司 硅片吸附机构及其使用方法
CN104440310A (zh) * 2014-12-02 2015-03-25 竹昌精密冲压件(上海)有限公司 一种数控机床自动吸真空装置
CN106002406A (zh) * 2016-07-01 2016-10-12 中航飞机股份有限公司西安飞机分公司 一种柔性数控铣床真空转接平台及使用方法
CN108922863A (zh) * 2018-07-03 2018-11-30 苏州映真智能科技有限公司 硅片吸取组件及硅片抓取机构

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0839377A (ja) * 1994-07-29 1996-02-13 Ckd Corp 真空チャック装置からのワークの取り外し方法及びワークの取り外し装置
JPH10277772A (ja) * 1997-04-02 1998-10-20 Sharp Corp 基板ビーム加工装置
JP2006036471A (ja) * 2004-07-28 2006-02-09 Shinko Electric Co Ltd 基板の受渡し方法、及びその装置
JP2008041761A (ja) * 2006-08-02 2008-02-21 Sekisui Chem Co Ltd 被処理物の処理後剥離方法及び設置装置
JP2010177607A (ja) * 2009-02-02 2010-08-12 Ushio Inc ワークステージ及び該ワークステージを使用した露光装置
JP2011042130A (ja) * 2009-08-21 2011-03-03 Konica Minolta Ij Technologies Inc インクジェットヘッドの製造方法
JP2011093081A (ja) * 2009-10-30 2011-05-12 Sun Yueh Way 吸着装置
CN102569147A (zh) * 2010-12-28 2012-07-11 上海微电子装备有限公司 硅片吸附机构及其使用方法
CN104440310A (zh) * 2014-12-02 2015-03-25 竹昌精密冲压件(上海)有限公司 一种数控机床自动吸真空装置
CN106002406A (zh) * 2016-07-01 2016-10-12 中航飞机股份有限公司西安飞机分公司 一种柔性数控铣床真空转接平台及使用方法
CN108922863A (zh) * 2018-07-03 2018-11-30 苏州映真智能科技有限公司 硅片吸取组件及硅片抓取机构

Also Published As

Publication number Publication date
JPH0575539B2 (enrdf_load_stackoverflow) 1993-10-20

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