JPS63139096A - 炭化珪素単結晶の製造方法 - Google Patents

炭化珪素単結晶の製造方法

Info

Publication number
JPS63139096A
JPS63139096A JP28498086A JP28498086A JPS63139096A JP S63139096 A JPS63139096 A JP S63139096A JP 28498086 A JP28498086 A JP 28498086A JP 28498086 A JP28498086 A JP 28498086A JP S63139096 A JPS63139096 A JP S63139096A
Authority
JP
Japan
Prior art keywords
single crystal
silicon carbide
substrate
carbide single
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28498086A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0327515B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Mitsuhiro Shigeta
光浩 繁田
Akira Suzuki
彰 鈴木
Masaki Furukawa
勝紀 古川
Yoshihisa Fujii
藤井　良久
Akitsugu Hatano
晃継 波多野
Atsuko Uemoto
植本　敦子
Kenji Nakanishi
健司 中西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP28498086A priority Critical patent/JPS63139096A/ja
Priority to US07/124,732 priority patent/US4865659A/en
Priority to DE8787310423T priority patent/DE3786148T2/de
Priority to EP87310423A priority patent/EP0269439B1/en
Publication of JPS63139096A publication Critical patent/JPS63139096A/ja
Publication of JPH0327515B2 publication Critical patent/JPH0327515B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP28498086A 1986-11-27 1986-11-27 炭化珪素単結晶の製造方法 Granted JPS63139096A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP28498086A JPS63139096A (ja) 1986-11-27 1986-11-27 炭化珪素単結晶の製造方法
US07/124,732 US4865659A (en) 1986-11-27 1987-11-24 Heteroepitaxial growth of SiC on Si
DE8787310423T DE3786148T2 (de) 1986-11-27 1987-11-25 Verfahren zur hetero-epitaktischen zuechtung.
EP87310423A EP0269439B1 (en) 1986-11-27 1987-11-25 A heteroepitaxial growth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28498086A JPS63139096A (ja) 1986-11-27 1986-11-27 炭化珪素単結晶の製造方法

Publications (2)

Publication Number Publication Date
JPS63139096A true JPS63139096A (ja) 1988-06-10
JPH0327515B2 JPH0327515B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-04-16

Family

ID=17685571

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28498086A Granted JPS63139096A (ja) 1986-11-27 1986-11-27 炭化珪素単結晶の製造方法

Country Status (1)

Country Link
JP (1) JPS63139096A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997039476A1 (fr) * 1996-04-18 1997-10-23 Matsushita Electric Industrial Co., Ltd. ELEMENT EN SiC ET SON PROCEDE DE PRODUCTION
US6273950B1 (en) 1996-04-18 2001-08-14 Matsushita Electric Industrial Co., Ltd. SiC device and method for manufacturing the same
JP2014205615A (ja) * 2014-05-29 2014-10-30 セイコーエプソン株式会社 立方晶炭化珪素半導体基板及び立方晶炭化珪素層

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997039476A1 (fr) * 1996-04-18 1997-10-23 Matsushita Electric Industrial Co., Ltd. ELEMENT EN SiC ET SON PROCEDE DE PRODUCTION
US6214107B1 (en) 1996-04-18 2001-04-10 Matsushita Electric Industrial Co., Ltd. Method for manufacturing a SiC device
US6273950B1 (en) 1996-04-18 2001-08-14 Matsushita Electric Industrial Co., Ltd. SiC device and method for manufacturing the same
JP2014205615A (ja) * 2014-05-29 2014-10-30 セイコーエプソン株式会社 立方晶炭化珪素半導体基板及び立方晶炭化珪素層

Also Published As

Publication number Publication date
JPH0327515B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-04-16

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