JPS63138761A - 集積回路用キヤパシタ - Google Patents
集積回路用キヤパシタInfo
- Publication number
- JPS63138761A JPS63138761A JP61284203A JP28420386A JPS63138761A JP S63138761 A JPS63138761 A JP S63138761A JP 61284203 A JP61284203 A JP 61284203A JP 28420386 A JP28420386 A JP 28420386A JP S63138761 A JPS63138761 A JP S63138761A
- Authority
- JP
- Japan
- Prior art keywords
- type
- capacitor
- layer
- area
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003990 capacitor Substances 0.000 title claims abstract description 28
- 239000004065 semiconductor Substances 0.000 claims abstract description 20
- 239000000758 substrate Substances 0.000 abstract description 14
- 238000000034 method Methods 0.000 abstract description 8
- 238000005530 etching Methods 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract description 2
- 238000000137 annealing Methods 0.000 abstract description 2
- 229910052796 boron Inorganic materials 0.000 abstract description 2
- 229910052698 phosphorus Inorganic materials 0.000 abstract description 2
- 239000011574 phosphorus Substances 0.000 abstract description 2
- 238000000151 deposition Methods 0.000 abstract 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 8
- 238000005468 ion implantation Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 230000010354 integration Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Semiconductor Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61284203A JPS63138761A (ja) | 1986-12-01 | 1986-12-01 | 集積回路用キヤパシタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61284203A JPS63138761A (ja) | 1986-12-01 | 1986-12-01 | 集積回路用キヤパシタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63138761A true JPS63138761A (ja) | 1988-06-10 |
| JPH0341985B2 JPH0341985B2 (OSRAM) | 1991-06-25 |
Family
ID=17675492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61284203A Granted JPS63138761A (ja) | 1986-12-01 | 1986-12-01 | 集積回路用キヤパシタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63138761A (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02106934A (ja) * | 1988-10-17 | 1990-04-19 | Nec Corp | 容量絶縁膜の形成方法 |
-
1986
- 1986-12-01 JP JP61284203A patent/JPS63138761A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02106934A (ja) * | 1988-10-17 | 1990-04-19 | Nec Corp | 容量絶縁膜の形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0341985B2 (OSRAM) | 1991-06-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |