JPS63132444A - ウエハハンドリング装置 - Google Patents

ウエハハンドリング装置

Info

Publication number
JPS63132444A
JPS63132444A JP61279453A JP27945386A JPS63132444A JP S63132444 A JPS63132444 A JP S63132444A JP 61279453 A JP61279453 A JP 61279453A JP 27945386 A JP27945386 A JP 27945386A JP S63132444 A JPS63132444 A JP S63132444A
Authority
JP
Japan
Prior art keywords
wafer
holder
wafers
arm
vertically moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61279453A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0529143B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Yoshio Tamura
田村　喜生
Shigehisa Tamura
茂久 田村
Eisuke Murasaka
村坂　英輔
Hisashi Maeda
尚志 前田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP61279453A priority Critical patent/JPS63132444A/ja
Publication of JPS63132444A publication Critical patent/JPS63132444A/ja
Publication of JPH0529143B2 publication Critical patent/JPH0529143B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Specific Conveyance Elements (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP61279453A 1986-11-21 1986-11-21 ウエハハンドリング装置 Granted JPS63132444A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61279453A JPS63132444A (ja) 1986-11-21 1986-11-21 ウエハハンドリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61279453A JPS63132444A (ja) 1986-11-21 1986-11-21 ウエハハンドリング装置

Publications (2)

Publication Number Publication Date
JPS63132444A true JPS63132444A (ja) 1988-06-04
JPH0529143B2 JPH0529143B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-04-28

Family

ID=17611276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61279453A Granted JPS63132444A (ja) 1986-11-21 1986-11-21 ウエハハンドリング装置

Country Status (1)

Country Link
JP (1) JPS63132444A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5407314A (en) * 1992-10-01 1995-04-18 Leybold Aktiengesellschaft Apparatus for synchronizing loading and unloading of substrates with turntable movement in a coating chamber
JP2006327752A (ja) * 2005-05-26 2006-12-07 Masaki Nakajima 搬送装置およびこれを備えた組合せ計量装置、品質検査装置
JP2009507380A (ja) * 2005-09-02 2009-02-19 アクセリス テクノロジーズ インコーポレーテッド 加工物移送装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5853149U (ja) * 1981-10-05 1983-04-11 株式会社　東京精密 ウエハ搬送装置
JPS61220349A (ja) * 1985-03-26 1986-09-30 Toshiba Corp ウエハ試験装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5853149U (ja) * 1981-10-05 1983-04-11 株式会社　東京精密 ウエハ搬送装置
JPS61220349A (ja) * 1985-03-26 1986-09-30 Toshiba Corp ウエハ試験装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5407314A (en) * 1992-10-01 1995-04-18 Leybold Aktiengesellschaft Apparatus for synchronizing loading and unloading of substrates with turntable movement in a coating chamber
JP2006327752A (ja) * 2005-05-26 2006-12-07 Masaki Nakajima 搬送装置およびこれを備えた組合せ計量装置、品質検査装置
JP2009507380A (ja) * 2005-09-02 2009-02-19 アクセリス テクノロジーズ インコーポレーテッド 加工物移送装置

Also Published As

Publication number Publication date
JPH0529143B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-04-28

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