JPH0529143B2 - - Google Patents

Info

Publication number
JPH0529143B2
JPH0529143B2 JP61279453A JP27945386A JPH0529143B2 JP H0529143 B2 JPH0529143 B2 JP H0529143B2 JP 61279453 A JP61279453 A JP 61279453A JP 27945386 A JP27945386 A JP 27945386A JP H0529143 B2 JPH0529143 B2 JP H0529143B2
Authority
JP
Japan
Prior art keywords
wafer
holder
lifting
arm
pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61279453A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63132444A (ja
Inventor
Yoshio Tamura
Shigehisa Tamura
Eisuke Murasaka
Hisashi Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP61279453A priority Critical patent/JPS63132444A/ja
Publication of JPS63132444A publication Critical patent/JPS63132444A/ja
Publication of JPH0529143B2 publication Critical patent/JPH0529143B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Specific Conveyance Elements (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP61279453A 1986-11-21 1986-11-21 ウエハハンドリング装置 Granted JPS63132444A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61279453A JPS63132444A (ja) 1986-11-21 1986-11-21 ウエハハンドリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61279453A JPS63132444A (ja) 1986-11-21 1986-11-21 ウエハハンドリング装置

Publications (2)

Publication Number Publication Date
JPS63132444A JPS63132444A (ja) 1988-06-04
JPH0529143B2 true JPH0529143B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-04-28

Family

ID=17611276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61279453A Granted JPS63132444A (ja) 1986-11-21 1986-11-21 ウエハハンドリング装置

Country Status (1)

Country Link
JP (1) JPS63132444A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4232959C2 (de) * 1992-10-01 2001-05-10 Leybold Ag Vorrichtung zum Ein- und Ausschleusen scheibenförmiger Substrate
JP4991977B2 (ja) * 2005-05-26 2012-08-08 株式会社イシダ 搬送装置およびこれを備えた組合せ計量装置、ランク分別装置
US7344352B2 (en) * 2005-09-02 2008-03-18 Axcelis Technologies, Inc. Workpiece transfer device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5853149U (ja) * 1981-10-05 1983-04-11 株式会社　東京精密 ウエハ搬送装置
JPS61220349A (ja) * 1985-03-26 1986-09-30 Toshiba Corp ウエハ試験装置

Also Published As

Publication number Publication date
JPS63132444A (ja) 1988-06-04

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees